Q3 Materials Science
Palvinder Singh, Amit Sachdeva, Shruti Singh, M. Z. A. Yahya, Nor Mas Mira Abd Rahman, Rishi Pal
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引用次数: 0

摘要

使用 Silvaco Visual T-CAD 模拟器模拟了 90 nm NMOS MOSFET 模型。用于模拟 NMOS MOSFET 的材料有 Al、Si、NpolySi 和 SiO2。为了克服短路问题,在 NMOS 模型中采用了轻掺杂漏极 (LDD) 植入技术。利用 T-CAD 模拟器对模型进行了分析,在保持氧化物厚度 (Tox) 2.373 nm 和栅极长度 0.09 µm 的情况下,获得了 2.568 V 的阈值电压 (Vth)。获得的结果与标准 ITRS 路线图进行了比较,结果几乎相似。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Nanoscale NMOS Device Model Analysis and its Characteristics

A 90 nm NMOS MOSFET model is simulated using Silvaco Visual T-CAD simulator. The materials used to simulate NMOS MOSFET are Al, Si, NpolySi, and SiO2. To overcome the problem of short circuits, lightly-doped drain (LDD) implantation is applied in NMOS model. The analysis of the model is determined with T-CAD simulator and obtained threshold voltage (Vth) 2.568 V, while keeping oxide thickness (Tox) 2.373 nm and gate length 0.09 µm. The obtained result is compared with standard ITRS road map and gets almost similar results.

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来源期刊
Macromolecular Symposia
Macromolecular Symposia Materials Science-Polymers and Plastics
CiteScore
1.50
自引率
0.00%
发文量
226
期刊介绍: Macromolecular Symposia presents state-of-the-art research articles in the field of macromolecular chemistry and physics. All submitted contributions are peer-reviewed to ensure a high quality of published manuscripts. Accepted articles will be typeset and published as a hardcover edition together with online publication at Wiley InterScience, thereby guaranteeing an immediate international dissemination.
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