基本光子器件的研究及氢氧化钾对铌酸锂芯片后清洗的影响

IF 0.8 4区物理与天体物理 Q3 PHYSICS, MULTIDISCIPLINARY

Journal of the Korean Physical Society Pub Date : 2024-12-11 DOI:10.1007/s40042-024-01250-0

Kiwon Kwon, Heedeuk Shin, Hyeong-soon Jang, Hyungjun Heo, Hojoong Jung

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引用次数: 0

摘要

本研究展示了铌酸锂薄膜平台上的波导、分束器和微环谐振器等铌酸锂光子器件的制造和光学特性。通过精确的制造技术和基于ar的蚀刻后的KOH后清洗，我们在传输损耗、分裂比和q因子等关键参数上实现了有效的光学性能。这些结果显示了铌酸锂在先进光子应用中的潜力，为其在集成片上光子学中的应用铺平了道路。

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Investigation of fundamental photonic devices and effect of post-cleaning using potassium hydroxide on lithium niobate chip

This study demonstrates the fabrication and optical characterization of lithium niobate photonic devices including waveguides, beam splitters, and microring resonators on a thin-film lithium niobate platform. Through precise fabrication techniques and KOH post-cleaning following Ar-based etching, we achieved effective optical performance across key parameters such as transmission loss, splitting ratios, and Q-factors. These results show the potential of lithium niobate in advanced photonic applications, paving the way for its use in integrated on-chip photonics.

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来源期刊

Journal of the Korean Physical Society PHYSICS, MULTIDISCIPLINARY-

CiteScore

1.20

自引率

16.70%

发文量

276

审稿时长

5.5 months

期刊介绍： The Journal of the Korean Physical Society (JKPS) covers all fields of physics spanning from statistical physics and condensed matter physics to particle physics. The manuscript to be published in JKPS is required to hold the originality, significance, and recent completeness. The journal is composed of Full paper, Letters, and Brief sections. In addition, featured articles with outstanding results are selected by the Editorial board and introduced in the online version. For emphasis on aspect of international journal, several world-distinguished researchers join the Editorial board. High quality of papers may be express-published when it is recommended or requested.