利用数据挖掘技术分析浮动区增长中难以捉摸的关系

IF 2.9 4区 工程技术 Q1 MULTIDISCIPLINARY SCIENCES
Lucas Vieira, Robert Menzel, Martin Holena, Natasha Dropka
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引用次数: 0

摘要

在可再生能源价值链中必不可少的高纯度硅单晶可以使用浮动区(FZ)方法生长。提高FZ工艺的收率,同时保持其稳定性是一个复杂但追求的目标。本研究考察了FZ生长过程中复杂的关系,重点研究了各种工艺参数如何同时影响具有代表性的晶体质量和工艺稳定性措施。数据挖掘技术应用于数值模拟合成数据。回归树确定了模型参数及其范围,这些参数负责感兴趣的数量的复杂行为,其中一些是双变量相关系数无法检测到的。晶体中心的数量受晶体半径和拉速的影响较大,而晶体表面附近的数量由于邻近而对反射器和电感器参数更为敏感。结果说明了数据挖掘技术如何支持FZ过程的知情参数工程实现理想的目标。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

An Analysis of Elusive Relationships in Floating Zone Growth Using Data Mining Techniques

An Analysis of Elusive Relationships in Floating Zone Growth Using Data Mining Techniques
High-purity silicon single crystals, essential in the renewable energy value chain, can be grown using the Floating Zone (FZ) method. Increasing the yield of the FZ process while maintaining its stability is a complex but sought-after goal. This study examines intricate relationships in FZ growth, focusing on how representative crystal quality and process stability measures are influenced by various process parameters simultaneously. Data mining techniques are applied to synthetic data from numerical simulations. Regression Trees identified model parameters and their ranges responsible for complex behavior of the quantities of interest, some of which are undetected by bivariate correlation coefficients. Quantities at the center of the crystal are highly affected by the crystal radius and pulling rate, while quantities near the surface of the crystal are more sensitive to the reflector and inductor parameters due to their proximity. The results illustrate how data mining techniques can support informed parameter engineering of the FZ process toward desirable goals.
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来源期刊
Advanced Theory and Simulations
Advanced Theory and Simulations Multidisciplinary-Multidisciplinary
CiteScore
5.50
自引率
3.00%
发文量
221
期刊介绍: Advanced Theory and Simulations is an interdisciplinary, international, English-language journal that publishes high-quality scientific results focusing on the development and application of theoretical methods, modeling and simulation approaches in all natural science and medicine areas, including: materials, chemistry, condensed matter physics engineering, energy life science, biology, medicine atmospheric/environmental science, climate science planetary science, astronomy, cosmology method development, numerical methods, statistics
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