利用哈特曼计测量光学表面平整度的波前逼近精度的Zernike多项式数值分析

IF 1 Q4 OPTICS

Optical Memory and Neural Networks Pub Date : 2024-12-11 DOI:10.3103/S1060992X24700395

I. V. Galaktionov, A. N. Nikitin, J. V. Sheldakova, V. V. Toporovsky, A. V. Kudryashov

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引用次数: 0

摘要

研制了一种基于Shack-Hartmann波前传感器的光学表面平整度测量装置——哈特曼计，并将测量结果与菲索干涉仪测量结果进行了比较。本文介绍了一种校正哈特曼计的方法，并将所研制的仪器与经典菲索干涉仪测量被测光学表面的结果进行了比较。菲索干涉仪测得的波前畸变总幅值为0.127 μm（标准差为0.022 μm）。畸变幅度为0.131µm（标准差0.024µm）。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Numerical Analysis of Wavefront Approximation Accuracy by Means of Zernike Polynomials for Optical Surface Flatness Measurements Using a Hartmannometer Device

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Numerical Analysis of Wavefront Approximation Accuracy by Means of Zernike Polynomials for Optical Surface Flatness Measurements Using a Hartmannometer Device

A metrological device—Hartmannometer—based on a Shack-Hartmann wavefront sensor for measuring the flatness of optical surfaces was developed and researched, and the results were compared with the results obtained from measurements using a Fizeau interferometer. The paper presents a method for calibrating a Hartmannometer, and also compares the results of measuring a test optical surface using the developed device and a classical Fizeau interferometer. The total amplitude of wavefront distortions measured using a Fizeau interferometer was 0.127 μm (standard deviation 0.022 μm). The Hartmannometer showed distortions amplitude of 0.131 µm (standard deviation 0.024 µm).

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来源期刊

Optical Memory and Neural Networks OPTICS-

CiteScore

1.50

自引率

11.10%

发文量

期刊介绍： The journal covers a wide range of issues in information optics such as optical memory, mechanisms for optical data recording and processing, photosensitive materials, optical, optoelectronic and holographic nanostructures, and many other related topics. Papers on memory systems using holographic and biological structures and concepts of brain operation are also included. The journal pays particular attention to research in the field of neural net systems that may lead to a new generation of computional technologies by endowing them with intelligence.