{"title":"平面非易失性存储器技术中的金属氧化物纳米复合材料光谱椭偏仪","authors":"V. A. Kotenev","doi":"10.1134/S2070205124701703","DOIUrl":null,"url":null,"abstract":"<p>The principles of application of spectral ellipsometry and reflectometry methods for nondestructive testing of inhomogeneous metal–oxide nanocomposites—working materials of planar nanotechnologies of nonvolatile memory—are considered. The reflection coefficients and ellipsometric parameters obtained at different wavelengths make it possible to reconstruct the internal structure of a metal–oxide nanocomposite layer inhomogeneous in volume by solving an integral equation of the first kind. The method was tested in the study of electrical contact ac-oxidation of steel based on the Fe–18Cr system in the region of low-temperature activation, where the structure, composition and electrical properties of the inhomogeneous surface thermo-oxide layer change significantly when the activity of the oxidizer changes.</p>","PeriodicalId":745,"journal":{"name":"Protection of Metals and Physical Chemistry of Surfaces","volume":"60 2","pages":"204 - 211"},"PeriodicalIF":1.1000,"publicationDate":"2024-10-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Spectral Ellipsometry of Metal–Oxide Nanocomposites in Planar Nonvolatile Memory Technologies\",\"authors\":\"V. A. Kotenev\",\"doi\":\"10.1134/S2070205124701703\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>The principles of application of spectral ellipsometry and reflectometry methods for nondestructive testing of inhomogeneous metal–oxide nanocomposites—working materials of planar nanotechnologies of nonvolatile memory—are considered. The reflection coefficients and ellipsometric parameters obtained at different wavelengths make it possible to reconstruct the internal structure of a metal–oxide nanocomposite layer inhomogeneous in volume by solving an integral equation of the first kind. The method was tested in the study of electrical contact ac-oxidation of steel based on the Fe–18Cr system in the region of low-temperature activation, where the structure, composition and electrical properties of the inhomogeneous surface thermo-oxide layer change significantly when the activity of the oxidizer changes.</p>\",\"PeriodicalId\":745,\"journal\":{\"name\":\"Protection of Metals and Physical Chemistry of Surfaces\",\"volume\":\"60 2\",\"pages\":\"204 - 211\"},\"PeriodicalIF\":1.1000,\"publicationDate\":\"2024-10-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Protection of Metals and Physical Chemistry of Surfaces\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S2070205124701703\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"METALLURGY & METALLURGICAL ENGINEERING\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Protection of Metals and Physical Chemistry of Surfaces","FirstCategoryId":"88","ListUrlMain":"https://link.springer.com/article/10.1134/S2070205124701703","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"METALLURGY & METALLURGICAL ENGINEERING","Score":null,"Total":0}
Spectral Ellipsometry of Metal–Oxide Nanocomposites in Planar Nonvolatile Memory Technologies
The principles of application of spectral ellipsometry and reflectometry methods for nondestructive testing of inhomogeneous metal–oxide nanocomposites—working materials of planar nanotechnologies of nonvolatile memory—are considered. The reflection coefficients and ellipsometric parameters obtained at different wavelengths make it possible to reconstruct the internal structure of a metal–oxide nanocomposite layer inhomogeneous in volume by solving an integral equation of the first kind. The method was tested in the study of electrical contact ac-oxidation of steel based on the Fe–18Cr system in the region of low-temperature activation, where the structure, composition and electrical properties of the inhomogeneous surface thermo-oxide layer change significantly when the activity of the oxidizer changes.
期刊介绍：
Protection of Metals and Physical Chemistry of Surfaces is an international peer reviewed journal that publishes articles covering all aspects of the physical chemistry of materials and interfaces in various environments. The journal covers all related problems of modern physical chemistry and materials science, including: physicochemical processes at interfaces; adsorption phenomena; complexing from molecular and supramolecular structures at the interfaces to new substances, materials and coatings; nanoscale and nanostructured materials and coatings, composed and dispersed materials; physicochemical problems of corrosion, degradation and protection; investigation methods for surface and interface systems, processes, structures, materials and coatings. No principe restrictions exist related systems, types of processes, methods of control and study. The journal welcomes conceptual, theoretical, experimental, methodological, instrumental, environmental, and all other possible studies.
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