用于 7-30 纳米范围 X 射线镜面光谱仪的色散元件

IF 1.1 4区物理与天体物理 Q4 PHYSICS, APPLIED

Technical Physics Pub Date : 2024-09-26 DOI:10.1134/S1063784224060136

S. A. Garakhin, A. Yu. Lopatin, A. N. Nechay, A. A. Perekalov, A. E. Pestov, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo

{"title":"用于 7-30 纳米范围 X 射线镜面光谱仪的色散元件","authors":"S. A. Garakhin, A. Yu. Lopatin, A. N. Nechay, A. A. Perekalov, A. E. Pestov, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo","doi":"10.1134/S1063784224060136","DOIUrl":null,"url":null,"abstract":"Multilayer interference structures acting as dispersion elements for a mirror spectrometer for a wavelength range of 7–30 nm have been calculated and synthesized. Three elements are implemented: for the range λ = 7–12 nm – multilayer structure Mo/B4C (number of periods N = 60, period thickness d = 6.5 nm); for the range λ = 11–18 nm – Mo/Be (N = 50; d = 9.83 nm) and for the range λ = 17–30 nm – Be/Si/Al (N = 40; d = 18.2 nm). For the entire spectral range, an efficiency of more than 10% was obtained at a wavelength resolution of 0.15–1.0 nm.","PeriodicalId":783,"journal":{"name":"Technical Physics","volume":"69 6","pages":"1568 - 1574"},"PeriodicalIF":1.1000,"publicationDate":"2024-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Dispersion Elements for X-ray Mirror Spectrometer on a Range of 7–30 nm\",\"authors\":\"S. A. Garakhin, A. Yu. Lopatin, A. N. Nechay, A. A. Perekalov, A. E. Pestov, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo\",\"doi\":\"10.1134/S1063784224060136\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Multilayer interference structures acting as dispersion elements for a mirror spectrometer for a wavelength range of 7–30 nm have been calculated and synthesized. Three elements are implemented: for the range λ = 7–12 nm – multilayer structure Mo/B4C (number of periods N = 60, period thickness d = 6.5 nm); for the range λ = 11–18 nm – Mo/Be (N = 50; d = 9.83 nm) and for the range λ = 17–30 nm – Be/Si/Al (N = 40; d = 18.2 nm). For the entire spectral range, an efficiency of more than 10% was obtained at a wavelength resolution of 0.15–1.0 nm.\",\"PeriodicalId\":783,\"journal\":{\"name\":\"Technical Physics\",\"volume\":\"69 6\",\"pages\":\"1568 - 1574\"},\"PeriodicalIF\":1.1000,\"publicationDate\":\"2024-09-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Technical Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S1063784224060136\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical Physics","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1134/S1063784224060136","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}

引用次数: 0

摘要

我们计算并合成了波长范围为 7-30 纳米的多层干涉结构，作为镜面光谱仪的色散元件。实现了三种元件：λ = 7-12 nm 范围 - 多层结构 Mo/B4C（周期数 N = 60，周期厚度 d = 6.5 nm）；λ = 11-18 nm 范围 - Mo/Be（N = 50；d = 9.83 nm）；λ = 17-30 nm 范围 - Be/Si/Al（N = 40；d = 18.2 nm）。在整个光谱范围内，波长分辨率为 0.15-1.0 nm 时，效率超过 10%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Dispersion Elements for X-ray Mirror Spectrometer on a Range of 7–30 nm

查看原文本刊更多论文

Dispersion Elements for X-ray Mirror Spectrometer on a Range of 7–30 nm

Multilayer interference structures acting as dispersion elements for a mirror spectrometer for a wavelength range of 7–30 nm have been calculated and synthesized. Three elements are implemented: for the range λ = 7–12 nm – multilayer structure Mo/B₄C (number of periods N = 60, period thickness d = 6.5 nm); for the range λ = 11–18 nm – Mo/Be (N = 50; d = 9.83 nm) and for the range λ = 17–30 nm – Be/Si/Al (N = 40; d = 18.2 nm). For the entire spectral range, an efficiency of more than 10% was obtained at a wavelength resolution of 0.15–1.0 nm.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Technical Physics 物理-物理：应用

CiteScore

1.30

自引率

14.30%

发文量

139

审稿时长

3-6 weeks

期刊介绍： Technical Physics is a journal that contains practical information on all aspects of applied physics, especially instrumentation and measurement techniques. Particular emphasis is put on plasma physics and related fields such as studies of charged particles in electromagnetic fields, synchrotron radiation, electron and ion beams, gas lasers and discharges. Other journal topics are the properties of condensed matter, including semiconductors, superconductors, gases, liquids, and different materials.