CMUT 的制造和建模方法 - 综述

IF 5.4 3区材料科学 Q2 CHEMISTRY, PHYSICAL

ACS Applied Energy Materials Pub Date : 2024-09-24 DOI:10.1016/j.sna.2024.115914

A.E. Biriukov, A.M. Korsunsky

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引用次数: 0

摘要

电容式微机械超声换能器（CMUT）的广泛应用促使人们开发了各种方法来制作和模拟这些换能器。方法的选择在很大程度上取决于换能器的应用领域，如医用超声、生物测定、距离/电平估算、无损检测等。同时，CMUT 的形状多种多样，可以采用单个元件、二维甚至三维阵列的形式。研究人员和开发人员面临着选择最合适的方法以获得最佳结果的问题。本研究报告总结分析了 CMUT 领域最常用的制造和建模技术。

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Methods of fabrication and modeling of CMUTs – A review

Widespread use of capacitive micromachined ultrasound transducers (CMUTs) has motivated the development of a variety of methods for their fabrication and modeling. The choice of methodology strongly depends on the application of the transducer being developed, e.g., for medical ultrasound, bioseinsing, distance/level estimation, non-destructive testing, etc. At the same time, CMUTs may have diverse shape and can be implemented in the form of single elements, 2D- or even 3D-arrays. Researchers and developers face a problem of choosing the most suitable approach to obtain the best results. The present study reports a summary analysis of the most used techniques for fabrication and modeling in the field of CMUTs.

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来源期刊

ACS Applied Energy Materials Materials Science-Materials Chemistry

CiteScore

10.30

自引率

6.20%

发文量

1368

期刊介绍： ACS Applied Energy Materials is an interdisciplinary journal publishing original research covering all aspects of materials, engineering, chemistry, physics and biology relevant to energy conversion and storage. The journal is devoted to reports of new and original experimental and theoretical research of an applied nature that integrate knowledge in the areas of materials, engineering, physics, bioscience, and chemistry into important energy applications.