沉积压力对通过磁控溅射沉积在 Ti6Al7Nb 合金上的δ-TaN 涂层的结构、纳米力学和摩擦学特性的影响

IF 2.3 4区 工程技术 Q2 ENGINEERING, MECHANICAL
Vivek Singh, Rajesh Kumar Sharma, Rakesh Sehgal
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Further, to analyze the nanomechanical properties of the deposited δ-TaN coatings, such as hardness (H) and modulus (E), scratch tests were performed utilizing the nanomechanical system. Moreover, friction and wear properties of the coating and bare sample (substrate) were investigated on nano-tribometer equipment using a rotary ball-on-disk type configuration. The stainless steel (SS-316) and silicon nitride (Si<jats:sub>3</jats:sub>N<jats:sub>4</jats:sub>) balls were used as the counter materials for the tribological tests. The observations of nanomechanical tests revealed that H (GPa), E (GPa), and H/E ratio values increased from 11.83 to 28.30 GPa, 176.02 to 248.45 GPa, and 0.06 to 0.11, respectively, with the decrease of the deposition pressure. In the scratch test, the highest critical load (cohesion failure) was found for δ-TaN coating deposited at the lowest deposition pressure (0.2 Pa). 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引用次数: 0

摘要

在本研究中,通过改变沉积压力(0.8-0.2 Pa),采用反应磁控溅射(物理气相沉积)在 Ti6Al7Nb 合金上沉积了 δ-TaN 薄膜。利用掠入射 X 射线衍射、能量色散光谱、扫描探针显微镜和场发射扫描电子显微镜分别研究了它们的晶体结构、化学成分、表面粗糙度和表面形貌。结构分析结果证实,δ-TaN薄膜沿(111)基面沉积为立方体;此外,场发射扫描电子显微镜还观察到了球形圆顶状的表面形貌。此外,为了分析沉积的 δ-TaN 涂层的纳米机械性能,如硬度(H)和模量(E),利用纳米机械系统进行了划痕测试。此外,还使用旋转球盘式配置的纳米测距仪设备研究了涂层和裸样品(基底)的摩擦和磨损特性。摩擦学测试使用了不锈钢(SS-316)和氮化硅(Si3N4)球作为对抗材料。纳米力学测试结果表明,随着沉积压力的降低,H(GPa)、E(GPa)和 H/E 比值分别从 11.83 GPa 增加到 28.30 GPa、176.02 GPa 增加到 248.45 GPa 和 0.06 增加到 0.11。在划痕试验中,在最低沉积压力(0.2 Pa)下沉积的δ-TaN 涂层的临界载荷(内聚失效)最高。摩擦学结果表明,δ-TaN 涂层与钢球和 Si3N4 球的平均摩擦系数(COF)值分别在 0.066-0.092 和 0.072-0.029 之间。对钢球和 Si3N4 球的磨损率值分别为 8.15 × 10-5 至 7.56 × 10-6 和 1.77 × 10-3 至 8.99 × 10-6。一般来说,随着涂层沉积压力的降低,316 SS 和 Si3N4 球的平均 COF 和磨损率都有所下降。然而,在 0.8 Pa 和 0.6 Pa 下沉积的涂层对 Si3N4 球的磨损率较高,导致 COF 图的突然波动和 10-3 mm3/N.m 范围内的磨损率增加。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impact of deposition pressure on the structural, nanomechanical, and tribological properties of δ-TaN coatings deposited via magnetron sputtering on Ti6Al7Nb alloy
In the present study, δ-TaN thin films were deposited by reactive magnetron sputtering (physical vapour deposition) on Ti6Al7Nb alloy by varying the deposition pressure (0.8–0.2 Pa). Their crystalline structure, chemical composition, surface roughness, and surface morphology were investigated by using grazing incidence X-ray diffraction, energy dispersive spectroscopy, scanning probe microscope, and field emission scanning electron microscopy (FESEM), respectively. Structural analysis results confirmed the deposition of cubic δ-TaN thin films along the (111) basal plane; moreover, spherical dome-like surface morphology was observed by FESEM. Further, to analyze the nanomechanical properties of the deposited δ-TaN coatings, such as hardness (H) and modulus (E), scratch tests were performed utilizing the nanomechanical system. Moreover, friction and wear properties of the coating and bare sample (substrate) were investigated on nano-tribometer equipment using a rotary ball-on-disk type configuration. The stainless steel (SS-316) and silicon nitride (Si3N4) balls were used as the counter materials for the tribological tests. The observations of nanomechanical tests revealed that H (GPa), E (GPa), and H/E ratio values increased from 11.83 to 28.30 GPa, 176.02 to 248.45 GPa, and 0.06 to 0.11, respectively, with the decrease of the deposition pressure. In the scratch test, the highest critical load (cohesion failure) was found for δ-TaN coating deposited at the lowest deposition pressure (0.2 Pa). Tribological results of δ-TaN coatings demonstrated average coefficient of friction (COF) value ranges between 0.066–0.092 and 0.072–0.029 against steel and Si3N4 balls, respectively. The wear rate values were observed to vary from 8.15 × 10−5 to 7.56 × 10−6 and from 1.77 × 10−3 to 8.99 × 10−6 against steel and Si3N4 balls, respectively. Generally, the average COF and wear rate decreased against 316 SS and Si3N4 balls as the deposition pressure of coatings decreased. However, the coating deposited at 0.8 and 0.6 Pa against Si3N4 ball showed early delamination of the coating, resulting in the sudden fluctuation in COF plots and higher wear rate in the range of 10−3 mm3/N.m.
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来源期刊
CiteScore
3.80
自引率
16.70%
发文量
370
审稿时长
6 months
期刊介绍: The Journal of Process Mechanical Engineering publishes high-quality, peer-reviewed papers covering a broad area of mechanical engineering activities associated with the design and operation of process equipment.
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