{"title":"CeO2 自锐凝胶磨具的开发及在石英玻璃上的磨削性能研究","authors":"Kaiping Feng, Lanxing Xu, Binghai Lyu, Liang Zhao, Tianchen Zhao","doi":"10.1007/s12206-024-0831-4","DOIUrl":null,"url":null,"abstract":"<p>To solve the problem that the surface of conventional CeO<sub>2</sub> abrasive tools tends to glaze during the grinding process, water-resistant aluminum nitride powder (A/S powder) is added into abrasive tools to improve the self-sharpening ability. The effect of acetic acid content and sintering temperature on the water resistance of A/S powder is studied. The porosity, pre-grinding and mechanical properties of abrasive tools with different A/S powder content are tested. It is found that when the mixed A/S powder content is 9 wt%, there is no obvious glaze layer on the surface of abrasive tools, and the material removal rate is the highest. The result of grinding experiment shows that the glazing phenomenon is ameliorated and the surface roughness <b><i>R</i></b><sub><b><i>a</i></b></sub> and the flatness <b><i>PV</i></b> of quartz glass reaches 1.876 nm and 1.651 µm after the chemical mechanical polishing (CMP).</p>","PeriodicalId":16235,"journal":{"name":"Journal of Mechanical Science and Technology","volume":"20 1","pages":""},"PeriodicalIF":1.5000,"publicationDate":"2024-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study on the development of CeO2 self-sharpening gel abrasive tools and grinding performance on quartz glass\",\"authors\":\"Kaiping Feng, Lanxing Xu, Binghai Lyu, Liang Zhao, Tianchen Zhao\",\"doi\":\"10.1007/s12206-024-0831-4\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>To solve the problem that the surface of conventional CeO<sub>2</sub> abrasive tools tends to glaze during the grinding process, water-resistant aluminum nitride powder (A/S powder) is added into abrasive tools to improve the self-sharpening ability. The effect of acetic acid content and sintering temperature on the water resistance of A/S powder is studied. The porosity, pre-grinding and mechanical properties of abrasive tools with different A/S powder content are tested. It is found that when the mixed A/S powder content is 9 wt%, there is no obvious glaze layer on the surface of abrasive tools, and the material removal rate is the highest. The result of grinding experiment shows that the glazing phenomenon is ameliorated and the surface roughness <b><i>R</i></b><sub><b><i>a</i></b></sub> and the flatness <b><i>PV</i></b> of quartz glass reaches 1.876 nm and 1.651 µm after the chemical mechanical polishing (CMP).</p>\",\"PeriodicalId\":16235,\"journal\":{\"name\":\"Journal of Mechanical Science and Technology\",\"volume\":\"20 1\",\"pages\":\"\"},\"PeriodicalIF\":1.5000,\"publicationDate\":\"2024-09-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Mechanical Science and Technology\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1007/s12206-024-0831-4\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, MECHANICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Mechanical Science and Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1007/s12206-024-0831-4","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}
Study on the development of CeO2 self-sharpening gel abrasive tools and grinding performance on quartz glass
To solve the problem that the surface of conventional CeO2 abrasive tools tends to glaze during the grinding process, water-resistant aluminum nitride powder (A/S powder) is added into abrasive tools to improve the self-sharpening ability. The effect of acetic acid content and sintering temperature on the water resistance of A/S powder is studied. The porosity, pre-grinding and mechanical properties of abrasive tools with different A/S powder content are tested. It is found that when the mixed A/S powder content is 9 wt%, there is no obvious glaze layer on the surface of abrasive tools, and the material removal rate is the highest. The result of grinding experiment shows that the glazing phenomenon is ameliorated and the surface roughness Ra and the flatness PV of quartz glass reaches 1.876 nm and 1.651 µm after the chemical mechanical polishing (CMP).
期刊介绍:
The aim of the Journal of Mechanical Science and Technology is to provide an international forum for the publication and dissemination of original work that contributes to the understanding of the main and related disciplines of mechanical engineering, either empirical or theoretical. The Journal covers the whole spectrum of mechanical engineering, which includes, but is not limited to, Materials and Design Engineering, Production Engineering and Fusion Technology, Dynamics, Vibration and Control, Thermal Engineering and Fluids Engineering.
Manuscripts may fall into several categories including full articles, solicited reviews or commentary, and unsolicited reviews or commentary related to the core of mechanical engineering.