使用环形照明共聚焦显微镜测量地表下结构时的轴向峰值提取

IF 2 3区材料科学 Q2 ENGINEERING, MECHANICAL

Surface Topography: Metrology and Properties Pub Date : 2024-08-19 DOI:10.1088/2051-672x/ad6b3c

Yong Jiang, Chenguang Liu, Chongliang Zou, Jian Liu

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引用次数: 0

摘要

使用环形照明和互补检测孔的三维暗场共聚焦显微镜（DFCM）能够检测超精密光学元件的次表面缺陷。本研究基于 sinc2 调谐模型，提出了一种适用于大孔径的 DFCM 调谐算法。该算法为测量次表面缺陷时提取轴向位置提供了一种可靠且理论上精确的方法。通过模拟和实验结果验证了该方法的合理性和准确性。

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Axial peak extraction in the measurement of subsurface structures with annular illumination confocal microscopy

Three-dimensional dark-field confocal microscopy (DFCM) using annular illumination and complementary detection apertures is capable of detecting subsurface defects in ultra-precision optical components. In this study, a DFCM tuning algorithm for large apertures is proposed based on the sinc² tuning model. This algorithm provides a reliable and theoretically accurate method for extracting the axial position during the measurement of subsurface defects. The rationality and accuracy of this method are verified through simulations and experimental results.

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来源期刊

Surface Topography: Metrology and Properties Materials Science-Materials Chemistry

CiteScore

4.10

自引率

22.20%

发文量

183

期刊介绍： An international forum for academics, industrialists and engineers to publish the latest research in surface topography measurement and characterisation, instrumentation development and the properties of surfaces.