富锗 Ge$_2$Sb$_2$Te$_5$ 合金中相变记忆操作的多物理场建模

Robin Miquel, Thomas Cabout, Olga Cueto, Benoît Sklénard, Mathis Plapp
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引用次数: 0

摘要

相变存储器(PCM)最广泛使用的活性材料之一--三元共沸化合物 Ge$_2$Sb$_2$Te$_5$ (GST) 的结晶温度较低,约为 150$^\circ$C。要达到更高的工作温度,一种解决方案是在 GST 中富集额外的锗(GGST)。这种合金会结晶成两种相的多晶混合物,即 GST 和几乎纯粹的锗。在之前的研究中[R. Bayle 等人,J. Appl.Phys. 128, 185101 (2020)],我们使用多相场模型(MPFM)和单独求解器计算的简化热场研究了这一结晶过程。在这里,我们将 MPFM 与相位感知电热求解器结合起来,为 PCM 中的器件操作建立了一致的多物理场模型。我们对内存操作进行了模拟,以证明它能够重现实验观察结果和用于评估 PCM 单元性能的最重要校准曲线。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Multi-Physics Modeling Of Phase Change Memory Operations in Ge-rich Ge$_2$Sb$_2$Te$_5$ Alloys
One of the most widely used active materials for phase-change memories (PCM), the ternary stoichiometric compound Ge$_2$Sb$_2$Te$_5$ (GST), has a low crystallization temperature of around 150$^\circ$C. One solution to achieve higher operating temperatures is to enrich GST with additional germanium (GGST). This alloy crystallizes into a polycrystalline mixture of two phases, GST and almost pure germanium. In a previous work [R. Bayle et al., J. Appl. Phys. 128, 185101 (2020)], this crystallization process was studied using a multi-phase field model (MPFM) with a simplified thermal field calculated by a separate solver. Here, we combine the MPFM and a phase-aware electro-thermal solver to achieve a consistent multi-physics model for device operations in PCM. Simulations of memory operations are performed to demonstrate its ability to reproduce experimental observations and the most important calibration curves that are used to assess the performance of a PCM cell.
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