获取倾斜物体 X 射线图像的光学系统建模

IF 0.6 4区物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY

Bulletin of the Lebedev Physics Institute Pub Date : 2024-08-28 DOI:10.3103/S1068335624600670

A. S. Busarov, N. L. Popov

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引用次数: 0

摘要

摘要本文讨论了一种用于获取缩小的 X 射线斜面图像的光学布局，它可用于解决 X 射线光刻问题。该布局的一个特点是能够以较小的掠射角照射光掩膜，同时以最小的失真记录图像。通过对工作波长为 13.9 纳米的 X 射线激光器进行数值模拟，可以发现该系统的空间分辨率和视场。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Modeling of Optical Systems for Obtaining X-Ray Images of Inclined Objects

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Modeling of Optical Systems for Obtaining X-Ray Images of Inclined Objects

The paper discusses an optical layout for obtaining reduced X-ray oblique images, which can be useful for X-ray lithography problems. A special feature of the layout is the ability to illuminate the photomask at small grazing angles while recording images with minimal distortion. Using numerical simulations carried out for an X-ray laser with an operating wavelength of 13.9 nm, the spatial resolution and field of view of this system are found.

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来源期刊

Bulletin of the Lebedev Physics Institute PHYSICS, MULTIDISCIPLINARY-

CiteScore

0.70

自引率

25.00%

发文量

审稿时长

6-12 weeks

期刊介绍： Bulletin of the Lebedev Physics Institute is an international peer reviewed journal that publishes results of new original experimental and theoretical studies on all topics of physics: theoretical physics; atomic and molecular physics; nuclear physics; optics; lasers; condensed matter; physics of solids; biophysics, and others.