{"title":"单晶硅振动辅助微铣削综合实验研究","authors":"","doi":"10.1016/j.jmapro.2024.09.008","DOIUrl":null,"url":null,"abstract":"<div><p>This study presents an experimental investigation of vibration-assisted machining (VAM) techniques for monocrystalline silicon. The author introduces a novel high-frequency two-dimensional vibration-assisted machining system which is used to conduct slot milling experiments using ultrasonic high-frequency. For comparison, a low-frequency non-resonant vibration-assisted machining system is also used in the experiments. The effects of machining parameters, including feedrate, cutting speeds, and vibration parameters, including vibration modes and amplitudes, on the machining performance are thoroughly investigated. The surface roughness, edge chipping generation, and tool wear under various machining conditions are characterised using scanning electron microscopy (SEM). The results show that, under specific machining and vibration parameters, a nanometric surface roughness (Ra) can be achieved. The ultrasonic vibration-assisted micro-milling (UVAMM) system is found to offer better surface quality, improved edge quality, and reduced tool wear. This study demonstrates that vibration-assisted micro-milling is a valuable technique for producing silicon components at scales ranging from a few microns with a nanometric surface finish with an improvement of 144 % compared to Conventional Machining (CM). The proposed 2D UVAMM system in this paper also provides valuable insight into the direction for utilizing 2D vibration-assisted machining systems to achieve superior machining results.</p></div>","PeriodicalId":16148,"journal":{"name":"Journal of Manufacturing Processes","volume":null,"pages":null},"PeriodicalIF":6.1000,"publicationDate":"2024-09-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S1526612524009125/pdfft?md5=bd036e08622cc9bccb2521b691025fe6&pid=1-s2.0-S1526612524009125-main.pdf","citationCount":"0","resultStr":"{\"title\":\"A comprehensive experimental investigation into vibration-assisted micro-milling of monocrystalline silicon\",\"authors\":\"\",\"doi\":\"10.1016/j.jmapro.2024.09.008\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>This study presents an experimental investigation of vibration-assisted machining (VAM) techniques for monocrystalline silicon. The author introduces a novel high-frequency two-dimensional vibration-assisted machining system which is used to conduct slot milling experiments using ultrasonic high-frequency. For comparison, a low-frequency non-resonant vibration-assisted machining system is also used in the experiments. The effects of machining parameters, including feedrate, cutting speeds, and vibration parameters, including vibration modes and amplitudes, on the machining performance are thoroughly investigated. The surface roughness, edge chipping generation, and tool wear under various machining conditions are characterised using scanning electron microscopy (SEM). The results show that, under specific machining and vibration parameters, a nanometric surface roughness (Ra) can be achieved. The ultrasonic vibration-assisted micro-milling (UVAMM) system is found to offer better surface quality, improved edge quality, and reduced tool wear. This study demonstrates that vibration-assisted micro-milling is a valuable technique for producing silicon components at scales ranging from a few microns with a nanometric surface finish with an improvement of 144 % compared to Conventional Machining (CM). The proposed 2D UVAMM system in this paper also provides valuable insight into the direction for utilizing 2D vibration-assisted machining systems to achieve superior machining results.</p></div>\",\"PeriodicalId\":16148,\"journal\":{\"name\":\"Journal of Manufacturing Processes\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":6.1000,\"publicationDate\":\"2024-09-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.sciencedirect.com/science/article/pii/S1526612524009125/pdfft?md5=bd036e08622cc9bccb2521b691025fe6&pid=1-s2.0-S1526612524009125-main.pdf\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Manufacturing Processes\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1526612524009125\",\"RegionNum\":1,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, MANUFACTURING\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Manufacturing Processes","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1526612524009125","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}
A comprehensive experimental investigation into vibration-assisted micro-milling of monocrystalline silicon
This study presents an experimental investigation of vibration-assisted machining (VAM) techniques for monocrystalline silicon. The author introduces a novel high-frequency two-dimensional vibration-assisted machining system which is used to conduct slot milling experiments using ultrasonic high-frequency. For comparison, a low-frequency non-resonant vibration-assisted machining system is also used in the experiments. The effects of machining parameters, including feedrate, cutting speeds, and vibration parameters, including vibration modes and amplitudes, on the machining performance are thoroughly investigated. The surface roughness, edge chipping generation, and tool wear under various machining conditions are characterised using scanning electron microscopy (SEM). The results show that, under specific machining and vibration parameters, a nanometric surface roughness (Ra) can be achieved. The ultrasonic vibration-assisted micro-milling (UVAMM) system is found to offer better surface quality, improved edge quality, and reduced tool wear. This study demonstrates that vibration-assisted micro-milling is a valuable technique for producing silicon components at scales ranging from a few microns with a nanometric surface finish with an improvement of 144 % compared to Conventional Machining (CM). The proposed 2D UVAMM system in this paper also provides valuable insight into the direction for utilizing 2D vibration-assisted machining systems to achieve superior machining results.
期刊介绍:
The aim of the Journal of Manufacturing Processes (JMP) is to exchange current and future directions of manufacturing processes research, development and implementation, and to publish archival scholarly literature with a view to advancing state-of-the-art manufacturing processes and encouraging innovation for developing new and efficient processes. The journal will also publish from other research communities for rapid communication of innovative new concepts. Special-topic issues on emerging technologies and invited papers will also be published.