Dongguen Kim, Heejin Kim, Yejin Kim, Minwoo Chae, Young Myoung Ko, Young-Mok Bae, Hyungsub Sim, Young Chan Oh, Keum Hwan Noh
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Using statistical models for optimal packaging in semiconductor manufacturing processes
The importance of the back-end process in semiconductor manufacturing has recently received significant attention from global manufacturers. The analysis of manufacturing data often provides crucial insights into problems inherent in the manufacturing processes. An important goal of the back-end process is to improve the yield of final products, called packages. A simple way to achieve this goal is to characterize low-quality wafers based on the analysis of manufacturing data and discard them before proceeding to the packaging step. Alternatively, this paper proposes a novel packaging method that significantly improves the package yield using statistical models scoring the quality of dies. We prove that the proposed packaging method is optimal and conduct thorough numerical experiments, showing its superiority.
期刊介绍:
The Journal of the Korean Statistical Society publishes research articles that make original contributions to the theory and methodology of statistics and probability. It also welcomes papers on innovative applications of statistical methodology, as well as papers that give an overview of current topic of statistical research with judgements about promising directions for future work. The journal welcomes contributions from all countries.