平面内应变下晶圆氮化铝薄膜的压电特性研究：第一原理研究

IF 2.9 3区材料科学 Q2 MATERIALS SCIENCE, COATINGS & FILMS

Coatings Pub Date : 2024-08-04 DOI:10.3390/coatings14080984

Guoqiang Qin, Ziyuan Zhao, Ao Wang, Wentao Wang, Shengjian Qin, Hongya Wu, Zhigang Yang, Gang Yu, Guanglei Zhang

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引用次数: 0

摘要

这篇研究文章介绍了在面内应变条件下伍兹状氮化铝（AlN）薄膜压电特性的全面第一性原理研究。通过计算压电张量系数（e33、e31 和 e15），我们研究了这些常数随面内应变的变化规律。我们的研究结果表明，在所考虑的面内应变范围内，压电常数会发生重大变化，尽管 e33 与 e31 和 e15 的趋势相反，但仍呈现出线性趋势。这项研究强调了氮化铝薄膜的压电性能对平面内应变的极端敏感性，表明它有可能成为调整和优化氮化铝基器件压电特性的有效手段。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Investigation of Piezoelectric Properties of Wurtzite AlN Films under In-Plane Strain: A First-Principles Study

This research article presents a comprehensive first-principles study on the piezoelectric properties of Wurtzite Aluminum Nitride (AlN) films under in-plane strain conditions. By calculating the piezoelectric tensor coefficients (e33, e31, and e15), we investigate the variation patterns of these constants with respect to in-plane strain. Our results indicate significant changes in the piezoelectric constants within the range of in-plane strain considered, exhibiting a linear trend despite opposite trends for e33 compared to e31 and e15. This study highlights the extreme sensitivity of AlN films’ piezoelectric performance to in-plane strain, suggesting its potential as an effective means for tuning and optimizing the piezoelectric properties of AlN-based devices.

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来源期刊

Coatings Materials Science-Surfaces, Coatings and Films

CiteScore

5.00

自引率

11.80%

发文量

1657

审稿时长

1.4 months

期刊介绍： Coatings is an international, peer-reviewed open access journal of coatings and surface engineering. It publishes reviews, research articles, communications and technical notes. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. Full experimental and/or methodical details must be provided. There are, in addition, unique features of this journal: * manuscripts regarding research proposals and research ideas will be particularly welcomed * electronic files or software regarding the full details of the calculation and experimental procedure - if unable to be published in a normal way - can be deposited as supplementary material