微波等离子体在 H2-CH4-N2 和 H2-CH4-NH3 混合气体中合成金刚石的二次成核过程比较

IF 0.6 4区物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY

Bulletin of the Lebedev Physics Institute Pub Date : 2024-08-05 DOI:10.3103/S106833562460044X

A. K. Martyanov, I. A. Tyazhelov, A. F. Popovich, V. G. Ralchenko, S. S. Savin, V. S. Sedov

{"title":"微波等离子体在 H2-CH4-N2 和 H2-CH4-NH3 混合气体中合成金刚石的二次成核过程比较","authors":"A. K. Martyanov, I. A. Tyazhelov, A. F. Popovich, V. G. Ralchenko, S. S. Savin, V. S. Sedov","doi":"10.3103/S106833562460044X","DOIUrl":null,"url":null,"abstract":"For the first time, the secondary diamond nucleation processes are compared during the growth of polycrystalline diamond films by the MPCVD method with addition of nitrogen and ammonia. An ammonia molecule (NH3) has a lower ionization energy than a nitrogen molecule (N2) in microwave plasma. It has been established that when using ammonia, the transition to the nanocrystalline structure of diamond occurs at significantly lower concentrations than when using nitrogen.","PeriodicalId":503,"journal":{"name":"Bulletin of the Lebedev Physics Institute","volume":"51 6","pages":"195 - 201"},"PeriodicalIF":0.6000,"publicationDate":"2024-08-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Comparison оf Secondary Nucleation Processes during Diamond Synthesis in Microwave Plasma in H2–CH4–N2 and H2–CH4–NH3 Gas Mixtures\",\"authors\":\"A. K. Martyanov, I. A. Tyazhelov, A. F. Popovich, V. G. Ralchenko, S. S. Savin, V. S. Sedov\",\"doi\":\"10.3103/S106833562460044X\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"For the first time, the secondary diamond nucleation processes are compared during the growth of polycrystalline diamond films by the MPCVD method with addition of nitrogen and ammonia. An ammonia molecule (NH3) has a lower ionization energy than a nitrogen molecule (N2) in microwave plasma. It has been established that when using ammonia, the transition to the nanocrystalline structure of diamond occurs at significantly lower concentrations than when using nitrogen.\",\"PeriodicalId\":503,\"journal\":{\"name\":\"Bulletin of the Lebedev Physics Institute\",\"volume\":\"51 6\",\"pages\":\"195 - 201\"},\"PeriodicalIF\":0.6000,\"publicationDate\":\"2024-08-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Bulletin of the Lebedev Physics Institute\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.3103/S106833562460044X\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Bulletin of the Lebedev Physics Institute","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.3103/S106833562460044X","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

摘要

摘要首次比较了添加氮气和氨气的 MPCVD 法生长多晶金刚石薄膜过程中的二次金刚石成核过程。在微波等离子体中，氨分子（NH3）的电离能低于氮分子（N2）。已经证实，在使用氨的情况下，金刚石向纳米晶体结构过渡的浓度明显低于使用氮的情况。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Comparison оf Secondary Nucleation Processes during Diamond Synthesis in Microwave Plasma in H2–CH4–N2 and H2–CH4–NH3 Gas Mixtures

查看原文本刊更多论文

Comparison оf Secondary Nucleation Processes during Diamond Synthesis in Microwave Plasma in H2–CH4–N2 and H2–CH4–NH3 Gas Mixtures

For the first time, the secondary diamond nucleation processes are compared during the growth of polycrystalline diamond films by the MPCVD method with addition of nitrogen and ammonia. An ammonia molecule (NH₃) has a lower ionization energy than a nitrogen molecule (N₂) in microwave plasma. It has been established that when using ammonia, the transition to the nanocrystalline structure of diamond occurs at significantly lower concentrations than when using nitrogen.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Bulletin of the Lebedev Physics Institute PHYSICS, MULTIDISCIPLINARY-

CiteScore

0.70

自引率

25.00%

发文量

审稿时长

6-12 weeks

期刊介绍： Bulletin of the Lebedev Physics Institute is an international peer reviewed journal that publishes results of new original experimental and theoretical studies on all topics of physics: theoretical physics; atomic and molecular physics; nuclear physics; optics; lasers; condensed matter; physics of solids; biophysics, and others.