利用二氧化碳激光退火在硅光子波导上结晶 Y3Fe5O12 薄膜

IF 2.8 3区材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY

Optical Materials Express Pub Date : 2024-04-30 DOI:10.1364/ome.523799

Junxian Wang, Songgang Cai, Yucong Yang, Zixuan Wei, Tianchi Zhang, Wei Yan, Lei Bi

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引用次数: 0

摘要

我们报告了利用二氧化碳激光退火（LA）技术在硅衬底和 SOI 波导上生长的 Y3Fe5O12（YIG）薄膜的局部结晶情况。系统研究了激光功率和氧压对 YIG 薄膜晶体结构的影响。激光功率主导着 YIG 薄膜的结晶度，而 LA 过程中的氧分压则强烈影响着晶体晶粒尺寸和磁各向异性。通过 LA 技术制备出了具有纯石榴石相的全结晶 YIG 薄膜。折射率 n 和消光系数 k 与快速热退火（RTA）制备的薄膜相当。在波长为 1550 nm 的 YIG/SOI 波导和 YIG/SiN 环形谐振器上测量的传播损耗与 RTA 退火薄膜相当，有望用于硅光子器件的开发。

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Crystallization of Y3Fe5O12 thin films on silicon photonic waveguides using CO2 laser annealing

We report the local crystallization of Y3Fe5O12 (YIG) thin films grown on Si substrates, and SOI waveguides by CO2 laser annealing (LA). The effect of laser power and oxygen pressure on the crystal structure of YIG films was systematically studied. Laser power dominated the YIG film crystallinity, while oxygen partial pressure during LA strongly influenced the crystal grain size and magnetic anisotropy. Fully crystallized YIG thin films with pure garnet phases were fabricated by LA. The refractive index n and extinction coefficient k were comparable to thin films fabricated by rapid thermal annealing (RTA). Propagation loss measured at 1550 nm wavelength on YIG/SOI waveguides and YIG/SiN ring resonators were comparable to RTA annealed films, promising device development for silicon photonics.

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来源期刊

Optical Materials Express MATERIALS SCIENCE, MULTIDISCIPLINARY-OPTICS

CiteScore

5.50

自引率

3.60%

发文量

377

审稿时长

1.5 months

期刊介绍： The Optical Society (OSA) publishes high-quality, peer-reviewed articles in its portfolio of journals, which serve the full breadth of the optics and photonics community. Optical Materials Express (OMEx), OSA''s open-access, rapid-review journal, primarily emphasizes advances in both conventional and novel optical materials, their properties, theory and modeling, synthesis and fabrication approaches for optics and photonics; how such materials contribute to novel optical behavior; and how they enable new or improved optical devices. The journal covers a full range of topics, including, but not limited to: Artificially engineered optical structures Biomaterials Optical detector materials Optical storage media Materials for integrated optics Nonlinear optical materials Laser materials Metamaterials Nanomaterials Organics and polymers Soft materials IR materials Materials for fiber optics Hybrid technologies Materials for quantum photonics Optical Materials Express considers original research articles, feature issue contributions, invited reviews, and comments on published articles. The Journal also publishes occasional short, timely opinion articles from experts and thought-leaders in the field on current or emerging topic areas that are generating significant interest.