退火后石墨烯:In2O3:氧化锌薄膜的光学和电学特性研究

S. Pat, Ahmet Akirtin, Ş. Korkmaz
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引用次数: 0

摘要

利用热离子真空电弧薄膜沉积技术对退火后 In2O3:ZnO:Graphene 薄膜的光学和电学特性进行了研究。通过对样品光学和电学特性的研究,确定了退火后的影响。沉积薄膜的最低带隙值为 3.22 eV。沉积薄膜是透明的。样品 AA2 可用作透明导电氧化物材料,电阻为 95 /cm。样品 AA2 在 400°C 下退火 30 分钟,样品 AA1 在 150°C 下退火 15 分钟。使用傅立叶变换红外光谱检测样品的石墨烯峰值。样品中的铟和锌原子比分别约为 2% 和 10%。因此,沉积样品 AA2 是用作透明导电氧化物的理想候选材料。沉积薄膜具有高透明度和相对较低的电阻。最后,石墨烯是一种很好的半导体掺杂材料。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation of Optical and Electric Properties of Post-Annealed Graphene: In2O3:ZnO Thin Film
An investigation of the optical and electric properties of post-annealed In2O3:ZnO:Graphene thin films was performed using a thermionic vacuum arc thin film deposition technology. The post-annealed effects were defined by an investigation of the sample's optical and electric properties. The lowest band gap value of 3.22 eV for the deposited thin film was obtained. Deposited thin films were transparent. The sample AA2 can be used as a transparent conductive oxide material with a resistance of 95 /cm. Sample AA2 was annealed at 400°C for 30 min, and sample AA1 was annealed at 150°C for 15 min. The graphene peaks for the samples were detected using a Fourier transform infrared spectra. The indium and zinc atomic ratios of the sample were approximately 2% and 10%, respectively. As a result, the deposited sample AA2 is a good candidate for use as transparent conductive oxide. Deposited films have high transparency and relatively low resistance. Finally, graphene is a good doping material for semiconductors.
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