低压电容耦合等离子体早期发展阶段的时间演变实验研究综述

Plasma Pub Date : 2024-07-22 DOI:10.3390/plasma7030029
Pietro Mandracci
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引用次数: 0

摘要

在低压下工作的电容耦合等离子体(CCP)放电被广泛用于合成薄膜和改变材料的表面特性。由于其重要性,多年来人们开展了大量研究以了解其工作机制,许多研究小组测量了 CCP 放电的物理特性,并经常使用流体模型和运动模型对其特性进行模拟。然而,文献中的大多数模拟和表征工作都集中在放电稳态特性上,因为大多数应用都依赖于其特性,而关于早期阶段的信息则较少。事实上,CCP 等离子体放电的初始阶段对于更好地理解其点火过程以及弄清脉冲放电的工作机制非常重要,近年来脉冲放电的使用越来越重要。本研究综述了近年来发表的有关低压 CCP 放电最初阶段物理机制的研究成果,重点是放电时间的最初几微秒。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Review of Experimental Investigations into the Time Evolution of Low-Pressure Capacitively Coupled Plasmas in Their Early Stages of Development
Capacitively coupled plasma (CCP) discharges working at low pressure are widely used for the synthesis of thin films and the modification of the surface properties of materials. Due to their importance, considerable research was carried out over the years to understand their working mechanisms, and the physical properties of the CCP discharges were measured by many research groups, while simulations of their characteristics were often performed using both fluid and kinematic models. However, most of the simulation and characterization work found in the literature is focused on the discharge steady-state characteristics, since most of the applications rely on its properties, while less information is available on the early stages. In fact, the initial stages of CCP plasma discharges are of great importance to improve the understanding of their ignition process as well as to figure out the working mechanism of pulsed discharges, the use of which has increased in importance in recent years. In this work, a review of the results published in recent years concerning the physical mechanisms involved in the very first stages of low-pressure CCP discharges is presented, focusing on the first few microseconds of discharge time.
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