通过热载流子注入实现亚带隙光电探测的互联等离子纳米隙天线

Q4 Engineering
J. Grasso, Rahul Raman, Brian G. Willis
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引用次数: 0

摘要

现代集成电路具有纳米级的有源元件。然而,光学器件往往受到以波长为单位的衍射效应的限制。能够将光转换成电信号的纳米级光电探测器是光电应用微型化的必要条件。等离子纳米结构中光与自由电子的强耦合克服了这些限制,它将光限制在具有强局部电场的亚波长体积内。局部电场在纳米棒末端和纳米结构之间的纳米间隙区域得到加强。表面等离子体的非辐射衰减在这些高电场区域内产生的热载流子可注入相邻半导体的导带,从而实现亚带隙光电探测。通过改变天线材料以及尺寸、厚度和形状等几何参数,可以调整这些等离子光电探测器的光学特性。电互连提供了将光转换为电信号的连接性。在这项工作中,用 ALD 沉积的 TiO2 封装了间隙为 35 nm 的互连纳米天线,通过肖特基势垒结实现了光电探测。对于低于二氧化钛带隙(3.2[式:见正文]eV)的波长,光电探测器具有很高的响应率(12[式:见正文][式:见正文]A/mW)。这些质子纳米隙天线是亚波长、可调谐光电探测器,在宽光谱范围内具有亚带隙响应率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Interconnected Plasmonic Nanogap Antennas for Sub-Bandgap Photodetection via Hot Carrier Injection
Modern integrated circuits have active components on the order of nanometers. However, optical devices are often limited by diffraction effects with dimensions measured in wavelengths. Nanoscale photodetectors capable of converting light into electrical signals are necessary for the miniaturization of optoelectronic applications. Strong coupling of light and free electrons in plasmonic nanostructures overcomes these limitations by confining light into sub-wavelength volumes with intense local electric fields. Localized electric fields are intensified at nanorod ends and in nanogap regions between nanostructures. Hot carriers generated within these high-field regions from nonradiative decay of surface plasmons can be injected into the conduction band of adjacent semiconductors, enabling sub-bandgap photodetection. The optical properties of these plasmonic photodetectors can be tuned by modifying antenna materials and geometric parameters like size, thickness, and shape. Electrical interconnects provide connectivity to convert light into electrical signals. In this work, interconnected nanogap antennas fabricated with 35 nm gaps are encapsulated with ALD-deposited TiO2, enabling photodetection via Schottky barrier junctions. Photodetectors with high responsivity (12[Formula: see text][Formula: see text]A/mW) are presented for wavelengths below the bandgap of TiO2 (3.2[Formula: see text]eV). These plasmonic nanogap antennas are sub-wavelength, tunable photodetectors with sub-bandgap responsivity for a broad spectral range.
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来源期刊
International Journal of High Speed Electronics and Systems
International Journal of High Speed Electronics and Systems Engineering-Electrical and Electronic Engineering
CiteScore
0.60
自引率
0.00%
发文量
22
期刊介绍: Launched in 1990, the International Journal of High Speed Electronics and Systems (IJHSES) has served graduate students and those in R&D, managerial and marketing positions by giving state-of-the-art data, and the latest research trends. Its main charter is to promote engineering education by advancing interdisciplinary science between electronics and systems and to explore high speed technology in photonics and electronics. IJHSES, a quarterly journal, continues to feature a broad coverage of topics relating to high speed or high performance devices, circuits and systems.
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