自制热蒸发技术中不同氩气/氧气比对无催化剂生长的影响

Q3 Chemical Engineering
Azira Khairudin, Najiha Hamid, Syahida Suhaimi, Mohd Ikmar Nizam Mohamad Isa, Nur Athirah Mohd Taib, Syamsul Kamar Muhamad @ Wahab
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引用次数: 0

摘要

通过简单的热管热蒸发技术,在硅晶片上沉积了不同氩气和氧气流量百分比的纳米结构氧化锌(ZnO)。利用 X 射线衍射 (XRD)、场发射扫描电子显微镜 (FESEM)、能量色散 X 射线 (EDX) 和 RAMAN 光谱分别表征了不同气体流速百分比对晶体结构、表面形貌和光学特性的影响。场发射扫描电子显微镜观察到的形貌变化非常明显,在含氧量为 5%、10% 和 25% 的条件下,生长出的氧化锌纳米结构呈现出三种不同的形状,分别是纳米三角形、纳米团簇和纳米棒。EDX 结果显示,Zn 和 O 元素在样品中占很大比例,这表明样品中的 ZnO 纯度很高。XRD 图谱显示,氧化锌最强烈的衍射峰位于(101)处,呈单晶六方结构,优先生长方向为 c 轴。RAMAN 散射研究发现,合成的氧化锌显示出较高的 E2 模式强度和较低的 E1 模式强度,这归因于所有样品都具有良好的晶体质量,含有较少的结构缺陷。总之,选择氧气流量为 25% 的 E15 样品是利用热管热蒸发工艺合成表面均匀、结晶度高的氧化锌的最佳结果。这项工作可促进氧化锌生产在各种应用领域的发展。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Influence of Varying Ar/O2 Gas Ratio with Catalyst-Free Growth by Homemade Thermal Evaporation Technique
A nanostructured zinc oxide (ZnO) with different percentages of argon and oxygen gas flow rate was deposited on a silicon wafer by a simple hot tube thermal evaporation technique. The effect of different percentages of gas flow rate on the crystal structure, surface morphology and optical properties were characterized using X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), energy dispersive X-ray (EDX) and RAMAN spectroscopy, respectively. The changes of morphologies from FESEM were significant where the grown ZnO nanostructures show three different shapes which are nanotripods, nanoclusters and nanorods at 5%, 10% and 25% of oxygen gas, respectively. EDX results revealed that Zn and O elements have a major percentage in the sample indicating a composition has high purity of ZnO. XRD patterns displayed the most intense diffraction peak of ZnO at (101), which exhibited a single crystalline hexagonal structure with preferred growth orientation in the c-axis. RAMAN scattering study found that synthesized ZnO shows the high intensity of E2 mode and low intensity of E1 mode attributed to all the samples having good crystal quality containing fewer structural defects. In conclusion, the E15 sample with a 25% oxygen gas flow rate was selected as an optimum result for synthesizing a homogenous surface and high crystallinity of ZnO by using a hot tube thermal evaporation process. This work can enhance the development of ZnO production in various applications.
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来源期刊
Journal of Advanced Research in Fluid Mechanics and Thermal Sciences
Journal of Advanced Research in Fluid Mechanics and Thermal Sciences Chemical Engineering-Fluid Flow and Transfer Processes
CiteScore
2.40
自引率
0.00%
发文量
176
期刊介绍: This journal welcomes high-quality original contributions on experimental, computational, and physical aspects of fluid mechanics and thermal sciences relevant to engineering or the environment, multiphase and microscale flows, microscale electronic and mechanical systems; medical and biological systems; and thermal and flow control in both the internal and external environment.
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