多尺度分析与等高线表面地形测量仪器计量特性的相关研究

IF 2 3区材料科学 Q2 ENGINEERING, MECHANICAL

Surface Topography: Metrology and Properties Pub Date : 2024-07-08 DOI:10.1088/2051-672x/ad5a29

M Eifler, J Hering-Stratemeier, G von Freymann, C A Brown, J Seewig

{"title":"多尺度分析与等高线表面地形测量仪器计量特性的相关研究","authors":"M Eifler, J Hering-Stratemeier, G von Freymann, C A Brown, J Seewig","doi":"10.1088/2051-672x/ad5a29","DOIUrl":null,"url":null,"abstract":"With the metrological characteristics, an effective framework for the calibration, adjustment, performance specification and verification of areal surface topography measuring instruments has been introduced. The characteristics have been thoroughly researched and analyzed for their different applications. Each characteristic provides specific information for a certain axis or feature of the measuring instrument. This enables an uncertainty estimation and a comparability of different measuring instruments. In this study, the comparison results of metrological characteristics are correlated with information obtained from multiscale analysis. With this examination it can be shown that both, metrological characteristics and multiscale analysis include significant information about transfer behaviors of surface structures, which can be applied advantageously for a calibration, performance verification and uncertainty determination of areal surface topography measuring instruments.","PeriodicalId":22028,"journal":{"name":"Surface Topography: Metrology and Properties","volume":"87 1","pages":""},"PeriodicalIF":2.0000,"publicationDate":"2024-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Correlational study of multiscale analysis and the metrological characteristics of areal surface topography measuring instruments\",\"authors\":\"M Eifler, J Hering-Stratemeier, G von Freymann, C A Brown, J Seewig\",\"doi\":\"10.1088/2051-672x/ad5a29\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"With the metrological characteristics, an effective framework for the calibration, adjustment, performance specification and verification of areal surface topography measuring instruments has been introduced. The characteristics have been thoroughly researched and analyzed for their different applications. Each characteristic provides specific information for a certain axis or feature of the measuring instrument. This enables an uncertainty estimation and a comparability of different measuring instruments. In this study, the comparison results of metrological characteristics are correlated with information obtained from multiscale analysis. With this examination it can be shown that both, metrological characteristics and multiscale analysis include significant information about transfer behaviors of surface structures, which can be applied advantageously for a calibration, performance verification and uncertainty determination of areal surface topography measuring instruments.\",\"PeriodicalId\":22028,\"journal\":{\"name\":\"Surface Topography: Metrology and Properties\",\"volume\":\"87 1\",\"pages\":\"\"},\"PeriodicalIF\":2.0000,\"publicationDate\":\"2024-07-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Surface Topography: Metrology and Properties\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.1088/2051-672x/ad5a29\",\"RegionNum\":3,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, MECHANICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface Topography: Metrology and Properties","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1088/2051-672x/ad5a29","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}

引用次数: 0

摘要

根据这些计量特性，介绍了校准、调整、性能规范和验证等高线表面地形测量仪器的有效框架。我们对这些特性的不同应用进行了深入研究和分析。每个特征都为测量仪器的某个轴或特征提供了特定信息。这样就可以对不同测量仪器进行不确定性估计和比较。在本研究中，计量特性的比较结果与多尺度分析获得的信息相关联。这项研究表明，计量特性和多尺度分析都包含有关表面结构传递行为的重要信息，可用于校准、性能验证和确定等高线表面地形测量仪器的不确定度。

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Correlational study of multiscale analysis and the metrological characteristics of areal surface topography measuring instruments

With the metrological characteristics, an effective framework for the calibration, adjustment, performance specification and verification of areal surface topography measuring instruments has been introduced. The characteristics have been thoroughly researched and analyzed for their different applications. Each characteristic provides specific information for a certain axis or feature of the measuring instrument. This enables an uncertainty estimation and a comparability of different measuring instruments. In this study, the comparison results of metrological characteristics are correlated with information obtained from multiscale analysis. With this examination it can be shown that both, metrological characteristics and multiscale analysis include significant information about transfer behaviors of surface structures, which can be applied advantageously for a calibration, performance verification and uncertainty determination of areal surface topography measuring instruments.

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来源期刊

Surface Topography: Metrology and Properties Materials Science-Materials Chemistry

CiteScore

4.10

自引率

22.20%

发文量

183

期刊介绍： An international forum for academics, industrialists and engineers to publish the latest research in surface topography measurement and characterisation, instrumentation development and the properties of surfaces.