射频溅射功率对单层氮化钛涂层的结构、纳米力学和摩擦学特性的影响

IF 2 3区材料科学 Q2 ENGINEERING, MECHANICAL

Surface Topography: Metrology and Properties Pub Date : 2024-07-02 DOI:10.1088/2051-672x/ad5b0b

Vivek Singh, Rajesh Kumar Sharma, Rakesh Sehgal and M F Wani

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引用次数: 0

摘要

利用反应射频磁控溅射技术在 Ti6Al7Nb 合金基底上沉积了单层 TaN 薄膜，靶材功率随之变化。为了评估这些涂层的晶体结构、化学成分和表面形貌，分别采用了掠入射 X 射线衍射 (GIXRD)、能量色散光谱 (EDS) 和扫描探针显微镜 (SPM)。研究结果表明，沉积功率会影响 TaN 涂层的结构和成分。使用 X 射线光电子能谱（XPS）进行的进一步分析表明，TaN 涂层主要由 Ta 和 N 组成，并含有微量的氧（O 1s）。此外，还进行了纳米力学测试，以评估硬度（H）、模量（E）和划痕特性。结果表明，与其他立方结构的钽涂层相比，多相六方钽涂层具有更优越的 H、E 和划痕性能。使用球盘纳米测距仪测定了干滑动条件下钢球的摩擦和磨损特性。研究结果表明，混合相 TaN 涂层的最小摩擦系数为 0.054，磨损率为 2.14 × 10-6 mm3/N.m。

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The effect of RF sputtering power on structural, nanomechanical and tribological properties of single layered TaN coatings

Single-layered TaN thin coatings were deposited on Ti6Al7Nb alloy substrates using reactive radiofrequency magnetron sputtering, with variations in target power. To assess the crystalline structure, chemical composition, and surface topography of these coatings, Grazing Incidence x-ray Diffraction (GIXRD), Energy Dispersive Spectroscopy (EDS), and Scanning Probe Microscopy (SPM) were employed, respectively. The study revealed that deposition power impacts the structure and composition of TaN coatings. Further analysis using x-ray Photoelectron Spectroscopy (XPS) indicated that the TaN coatings predominantly consisted of Ta and N, with trace amounts of oxygen (O 1s). Additionally, nanomechanical testing was conducted to evaluate hardness (H), modulus (E), and scratch properties. Results suggested that multiphase hex-TaN coatings exhibited superior H, E, and scratch properties compared to other cubic-structured TaN coatings. Friction and wear properties against steel balls under dry sliding conditions were determined using a ball-on-disk nanotribometer. The findings showed that mix-phase TaN coating exhibited a minimum coefficient of friction of 0.054 and a wear rate of 2.14 × 10−6 mm3/N.m. Abrasion, ploughing and oxidation were identified as the primary wear mechanism responsible for the wear of the TaN coatings.

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来源期刊

Surface Topography: Metrology and Properties Materials Science-Materials Chemistry

CiteScore

4.10

自引率

22.20%

发文量

183

期刊介绍： An international forum for academics, industrialists and engineers to publish the latest research in surface topography measurement and characterisation, instrumentation development and the properties of surfaces.