使用光学方法测量薄膜厚度综述

IF 1.9 4区 工程技术 Q2 Engineering
Jungjae Park, Yong Jai Cho, Won Chegal, Joonyoung Lee, Yoon-Soo Jang, Jonghan Jin
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引用次数: 0

摘要

本文回顾了以前对厚度小于一微米的薄膜进行厚度测量的研究。薄膜是一种广泛应用于半导体、显示器和二次电池等高科技行业的结构。测量薄膜厚度的典型非破坏性和非接触式技术是光谱反射仪(SR)和光谱椭偏仪(SE)。SR 可以通过简单的布局测量薄膜厚度。通过将光谱反射仪和光学干涉仪相结合,提出并演示了同时测量薄膜和三维表面轮廓或厚层的方法。为了对 SR 进行分析和验证,已经发表了一些包括人工智能算法和不确定性评估在内的著作。SE 可以测量较薄的厚度,并能获得更多与偏振态、入射角、波长等有关的信息。根据构成基本光学布局的元件类型、位置和数量,椭偏仪可分为五种类型。根据椭偏传递量的数学模型,讨论了椭偏仪的工作原理和测量程序。为确保测量的可靠性,对 SE 的不确定度分量进行了评估。随着未来高科技产业的发展,薄膜厚度测量技术有望以更快的测量速度、更高的动态范围和更好的测量可靠性得到更广泛的应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

A Review of Thin-film Thickness Measurements using Optical Methods

A Review of Thin-film Thickness Measurements using Optical Methods

This paper reviews earlier studies focusing on thickness measurements of thin films less than one micrometer thick. Thin films are a widely used structure in high-tech industries such as the semiconductor, display, and secondary battery industries. Typical non-destructive and non-contact techniques for measuring the thickness of thin films are spectral reflectometry (SR) and spectroscopic ellipsometry (SE). SR can measure the thin-film thickness with a simple layout. With the combination of SR and optical interferometry, the simultaneous measurements of thin film and 3D surface profiles or thick layer have been proposed and demonstrated. For an analysis and verification of SR, several works including artificial intelligence algorithms and uncertainty evaluations have been published. SE can measure thinner thicknesses with more information pertaining to the polarization state, incident angle, wavelength, and etc. According to the type, location, and number of elements that make up the basic optical layout, ellipsometers can be classified into five types. Based on a mathematical model of the ellipsometric transfer quantity, the operational principle and measurement procedure are discussed. To ensure measurement reliability, the uncertainty components of the SE were evaluated. With the development of high-tech industries in the future, thin-film thickness measurement techniques can be expected to find wider use with faster measurement speeds, a higher dynamic range, and better measurement reliability.

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来源期刊
CiteScore
4.10
自引率
10.50%
发文量
115
审稿时长
3-6 weeks
期刊介绍: The International Journal of Precision Engineering and Manufacturing accepts original contributions on all aspects of precision engineering and manufacturing. The journal specific focus areas include, but are not limited to: - Precision Machining Processes - Manufacturing Systems - Robotics and Automation - Machine Tools - Design and Materials - Biomechanical Engineering - Nano/Micro Technology - Rapid Prototyping and Manufacturing - Measurements and Control Surveys and reviews will also be planned in consultation with the Editorial Board.
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