通过磁控溅射制造具有自补偿应力的铌硅高反射薄膜

{"title":"通过磁控溅射制造具有自补偿应力的铌硅高反射薄膜","authors":"Wenyan He, Mingdong Kong, Ge Ren, Ming Wei","doi":"10.1117/1.oe.63.9.091603","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":509903,"journal":{"name":"Optical Engineering","volume":" 39","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Niobium-silicon high-reflectance film with self-compensated stress fabricated by magnetron sputtering\",\"authors\":\"Wenyan He, Mingdong Kong, Ge Ren, Ming Wei\",\"doi\":\"10.1117/1.oe.63.9.091603\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":509903,\"journal\":{\"name\":\"Optical Engineering\",\"volume\":\" 39\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-06-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/1.oe.63.9.091603\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/1.oe.63.9.091603","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}