利用脉冲激光沉积法在石英上生长的氮化镓异质结构的光学特性

Abeer R. Abbas, M. Fakhri, A. Alwahib, Motahher A. Qaeed, S. Gopinath
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引用次数: 0

摘要

利用物理气相沉积技术(PVD),特别是脉冲激光沉积技术(PLD),对石英基底上生长的氮化镓(GaN)薄膜进行了光学分析。薄膜的生长使用了 Q 开关掺钕钇铝石榴石(Nd: YAG)激光器发出的不同波长(1064、532 和 355)nm 激光,所有过程都在 10-2 m bar 的真空压力下进行。氮化镓薄膜的吸收系数是在室温下通过紫外可见扩散光谱测定的,测量波长范围为 200 至 1000 纳米。当波长为 1064 纳米时,吸收峰出现在 227 纳米处;当波长为 532 纳米时,吸收峰出现在 217 纳米处;当波长为 355 纳米时,吸收峰出现在 222 纳米处。光学能隙是分析薄膜特性和评估其作为气体传感器潜力的重要统计指标。所制备薄膜的直接能隙 (Eg) 值是通过分析不同波长下 (α h) 与能隙 (ev) 值之间的关系图确定的。在 1064、532 和 355 纳米波长下,能量值分别为 3.36 eV、3.62 eV 和 3.7 eV。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optical Properties of Gallium Nitride Heterostructures Grown on Quartz Using Pulse Laser Deposition Method
An optical analysis was conducted on a Gallium nitride (GaN) thin film grown on a quartz substrate using the physical vapor deposition technique (PVD), specifically, pulsed laser deposition (PLD). The film was grown using different laser wavelengths (1064, 532, and 355) nm from a Q-switch neodymium-doped yttrium aluminum garnet (Nd: YAG) laser, all performed under a vacuum pressure of 10-2 m bar. The absorption coefficient of the GaN thin film was determined by performing UV-Vis diffused spectroscopy at room temperature and measuring wavelengths ranging from 200 to 1000 nm. The absorption peak occurs at 227 nm when the wavelength is 1064 nm, at 217 nm when the wavelength is 532 nm, and at 222 nm when the wavelength is 355 nm. The optical energy gap is a crucial statistic for analyzing the properties of thin films and assessing their potential as gas sensors. The value of the direct energy gap (Eg) for the prepared films was established by analyzing the graph that shows the relationship between (α h) and the energy gap (ev) values at different wavelengths. The energy values were determined to be 3.36 eV, 3.62 eV, and 3.7 eV for 1064, 532, and 355 nm wavelengths, respectively.
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