用于高速短波红外光子应用的可转移 GeSn 带状光电探测器

Haochen Zhao, Suho Park, Guangyang Lin, Yuying Zhang, Tuofu Zhama, Chandan Samanta, Lorry Chang, Xiaofeng Zhu, Xu Feng, Kevin O. Díaz-Aponte, Lin Cong, Yuping Zeng
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引用次数: 0

摘要

我们通过实验演示了将硒化锗带转移到绝缘基板上的低成本工艺,该工艺适用于短波红外(SWIR)传感/成像应用。通过释放原始压缩 GeSn 层到接近完全松弛状态的 GeSn 带,光电探测器的室温光谱响应进一步扩展到 3.2 μm,可覆盖整个 SWIR 范围。与原生长的 GeSn 基准光电探测器相比,所制造的 GeSn 带状光电探测器的明暗电流比提高了五倍,从而提高了用于高性能光电探测的探测率。对 GeSn 带状光电探测器的瞬态性能进行了研究,其上升时间约为 40 μs,超过了大多数 GeSn(Ge)相关器件的响应时间。此外,这种转移工艺可应用于各种基底,使其成为一种多功能技术,可用于从光电子学到大面积电子学的各种应用。这些结果为开发基于含Sn的第IV族低维结构的低成本高速SWIR光电探测器提供了富有洞察力的指导。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications
We experimentally demonstrate a low-cost transfer process of GeSn ribbons to insulating substrates for short-wave infrared (SWIR) sensing/imaging applications. By releasing the original compressive GeSn layer to nearly fully relaxed state GeSn ribbons, the room-temperature spectral response of the photodetector is further extended to 3.2 μm, which can cover the entire SWIR range. Compared with the as-grown GeSn reference photodetectors, the fabricated GeSn ribbon photodetectors have a fivefold improvement in the light-to-dark current ratio, which can improve the detectivity for high-performance photodetection. The transient performance of a GeSn ribbon photodetector is investigated with a rise time of about 40 μs, which exceeds the response time of most GeSn (Ge)-related devices. In addition, this transfer process can be applied on various substrates, making it a versatile technology that can be used for various applications ranging from optoelectronics to large-area electronics. These results provide insightful guidance for the development of low-cost and high-speed SWIR photodetectors based on Sn-containing group IV low-dimensional structures.
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