退火工艺对利用 PLD 技术制备的铜氧化锰薄膜的形态、光学和电学特性的影响

Doaa T. Mohammed, G. Mohammed
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引用次数: 0

摘要

本研究使用波长为 1064 nm、功率为 500 mJ、脉宽为 9 ns、重复频率为 6 Hz 的 Nd:YAG 激光脉冲照射氧化锰 (MnO) 靶表面 300 次。研究了通过 PLD 生产的纯氧化锰和不同铜含量(0.03、0.05、0.07 和 0.09 wt%)的铜掺杂氧化锰(Cu:MnO)。Cu:MnO 薄膜在 473 K 下退火,并研究了其形态、光学和电学特性。原子力显微镜(AFM)对形态特性的研究结果表明,Cu 掺杂影响了 MnO2 薄膜的粗糙度和颗粒大小。紫外可见分光光度计检测了光学透射率。掺杂剂含量为 0.09 时,光吸收率最高。研究了介电常数的实部(εr)和虚部(εi),以及消光系数(k)、折射率(n)和其他光学常数。在退火温度为 (473 K) 时,霍尔效应研究表明所有制备的薄膜都具有 P 型导电性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of Annealing Process on the Morphological, Optical and Electrical Properties of Cu:MnO Films Prepared by PLD Technique
In this study, Nd:YAG laser pulses with a wavelength of 1064 nm, a power of 500 mJ, a pulse width of 9 ns, and a repetition frequency of 6 Hz were used to hit a manganese oxide (MnO) target surface 300 times. Pure MnO and copper Cu-doped MnO (Cu:MnO) with different amounts of Cu (0.03, 0.05, 0.07, and 0.09 wt%) produced by PLD were studied. Cu:MnO thin films were annealed at 473 K, and their morphological, optical, and electrical characteristics were studied. The results of the atomic force microscopic (AFM) investigation of morphological properties showed that Cu dopant impacted the creation of roughness and particle size in MnO2 films. The optical transmission was examined using a UV-Vis spectrophotometer. The highest optical absorption was noted at 0.09 dopant content. The dielectric constants' real (εr) and imaginary (εi) components, as well as the extinction coefficient (k), refractive index (n), and other optical constants, were studied. At an annealing temperature of (473 K), Hall effect studies demonstrate that all produced films exhibit a P-type conductivity.
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