通过磁控溅射获得的基于二氧化铈的涂层性能

IF 0.5 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

Inorganic Materials: Applied Research Pub Date : 2024-06-03 DOI:10.1134/S2075113324700230

A. S. Baikin, E. O. Nasakina, A. G. Kolmakov, K. V. Sergienko, M. A. Sudarchikova, M. A. Sevostyanov

{"title":"通过磁控溅射获得的基于二氧化铈的涂层性能","authors":"A. S. Baikin, E. O. Nasakina, A. G. Kolmakov, K. V. Sergienko, M. A. Sudarchikova, M. A. Sevostyanov","doi":"10.1134/S2075113324700230","DOIUrl":null,"url":null,"abstract":"Abstract—The review presents the parameters of magnetron sputtering of coatings based on cerium dioxide and their relationship to the structure and key properties of coatings. The influence of the type of target, the introduction of oxygen into the sputtering medium, changes in sputtering power, bias voltage, type of substrate, and its temperature on the structure, mechanical properties, and hydrophobicity of CeO2-based coatings are considered.","PeriodicalId":586,"journal":{"name":"Inorganic Materials: Applied Research","volume":"15 3","pages":"796 - 802"},"PeriodicalIF":0.5000,"publicationDate":"2024-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Properties of Coatings Based on Cerium Dioxide Obtained by Magnetron Sputtering\",\"authors\":\"A. S. Baikin, E. O. Nasakina, A. G. Kolmakov, K. V. Sergienko, M. A. Sudarchikova, M. A. Sevostyanov\",\"doi\":\"10.1134/S2075113324700230\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Abstract—The review presents the parameters of magnetron sputtering of coatings based on cerium dioxide and their relationship to the structure and key properties of coatings. The influence of the type of target, the introduction of oxygen into the sputtering medium, changes in sputtering power, bias voltage, type of substrate, and its temperature on the structure, mechanical properties, and hydrophobicity of CeO2-based coatings are considered.\",\"PeriodicalId\":586,\"journal\":{\"name\":\"Inorganic Materials: Applied Research\",\"volume\":\"15 3\",\"pages\":\"796 - 802\"},\"PeriodicalIF\":0.5000,\"publicationDate\":\"2024-06-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Inorganic Materials: Applied Research\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S2075113324700230\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Inorganic Materials: Applied Research","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1134/S2075113324700230","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

摘要

摘要--综述介绍了基于二氧化铈的磁控溅射涂层的参数及其与涂层结构和主要性能的关系。研究了靶材类型、溅射介质中氧气的引入、溅射功率、偏置电压、基底类型及其温度的变化对二氧化铈涂层的结构、机械性能和疏水性的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Properties of Coatings Based on Cerium Dioxide Obtained by Magnetron Sputtering

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Properties of Coatings Based on Cerium Dioxide Obtained by Magnetron Sputtering

Abstract—The review presents the parameters of magnetron sputtering of coatings based on cerium dioxide and their relationship to the structure and key properties of coatings. The influence of the type of target, the introduction of oxygen into the sputtering medium, changes in sputtering power, bias voltage, type of substrate, and its temperature on the structure, mechanical properties, and hydrophobicity of CeO₂-based coatings are considered.

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来源期刊

Inorganic Materials: Applied Research Engineering-Engineering (all)

CiteScore

0.90

自引率

0.00%

发文量

199

期刊介绍： Inorganic Materials: Applied Research contains translations of research articles devoted to applied aspects of inorganic materials. Best articles are selected from four Russian periodicals: Materialovedenie, Perspektivnye Materialy, Fizika i Khimiya Obrabotki Materialov, and Voprosy Materialovedeniya and translated into English. The journal reports recent achievements in materials science: physical and chemical bases of materials science; effects of synergism in composite materials; computer simulations; creation of new materials (including carbon-based materials and ceramics, semiconductors, superconductors, composite materials, polymers, materials for nuclear engineering, materials for aircraft and space engineering, materials for quantum electronics, materials for electronics and optoelectronics, materials for nuclear and thermonuclear power engineering, radiation-hardened materials, materials for use in medicine, etc.); analytical techniques; structure–property relationships; nanostructures and nanotechnologies; advanced technologies; use of hydrogen in structural materials; and economic and environmental issues. The journal also considers engineering issues of materials processing with plasma, high-gradient crystallization, laser technology, and ultrasonic technology. Currently the journal does not accept direct submissions, but submissions to one of the source journals is possible.