纳米光机械光纤尖端传感

Arthur L. Hendriks, Luca Picelli, René P. J. van Veldhoven, Ewold Verhagen, Andrea Fiore
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引用次数: 0

摘要

纳米光机械传感器利用光在纳米尺度上的局限性,能够非常精确地测量位移、力、加速度和质量。由于纳米光机械谐振器之间的光耦合需要复杂的光学设置或封装方案,这阻碍了它们的应用。在这项工作中,我们提出了一种无需耦合光学器件的光纤耦合纳米光学机械传感器。这是通过使用简单、可扩展的晶圆到光纤传输方法,将纳米光机械结构--双膜光子晶体(DM-PhC)直接置于光纤面上实现的。该器件在反射中进行探测,在电信波长处具有共振,光谱宽度相对较宽,为3-10 nm,有利于简单读出,实现了$$10,{\rm{fm}}/\{sqrt{\rm{Hz}}}}$$的位移精度。利用谐振驱动和降频测量,我们可以通过光纤诱导和监测 nm 级振幅的机械振荡,从而跟踪机械谐振频率和机械线宽,精度分别为 79 和 12 Hz,积分时间为 4.5 s。我们进一步展示了这种光纤尖端传感器在压力测量中的应用,利用碰撞阻尼对机械线宽的影响,在 290 秒的积分时间内,精度达到 $$9\times {10}^{-4}\,{\rm{mbar}}$ 。这种光机械学与光纤尖端传感的结合可能会开辟一条通往具有前所未有的功能、超小型占地面积和低成本读出的新一代光纤传感器的道路。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Nano-optomechanical fiber-tip sensing

Nano-optomechanical fiber-tip sensing
Nano-optomechanical sensors exploit light confinement at the nanoscale to enable very precise measurements of displacement, force, acceleration, and mass. Their application is hampered by the complex optical set-ups or packaging schemes required to couple light to and from the nano-optomechanical resonator. In this work, we present a fiber-coupled nano-optomechanical sensor that requires no coupling optics. This is achieved by directly placing a nano-optomechanical structure, a double membrane photonic crystal (DM-PhC), on the facet of a fiber, using a simple and scalable wafer-to-fiber transfer method. The device is probed in reflection and has a resonance at telecom wavelengths with a relatively broad spectral width of 3–10 nm, which is advantageous for a simple read-out and achieves a displacement imprecision of $$10\,{{\rm{fm}}}/{\sqrt{{\rm{Hz}}}}$$ . Using resonant driving and a ringdown measurement, we can induce and monitor mechanical oscillations with an nm-scale amplitude via the fiber, which allows for tracking the mechanical resonant frequency and the mechanical linewidth with imprecisions of 79 and 12 Hz, respectively, at integration times of 4.5 s. We further demonstrate the application of this fiber-tip sensor to the measurement of pressure, using the effect of collisional damping on the mechanical linewidth, leading to the imprecision of $$9\times {10}^{-4}\,{\rm{mbar}}$$ with an integration time of 290 s. This combination of optomechanics and fiber-tip sensing may open the way to a new generation of fiber sensors with unprecedented functionality, ultrasmall footprint, and low-cost readout.
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