微机电系统声发射传感器的进展：综述

IF 1.6 4区工程技术 Q3 INSTRUMENTS & INSTRUMENTATION

Sensor Review Pub Date : 2024-06-03 DOI:10.1108/sr-06-2023-0232

Junhui Zhang, Sai Zhang, Yuhua Yang, Wendong Zhang

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引用次数: 0

摘要

目的基于微机电系统（MEMS）技术的声发射传感器因其体积小、一致性好、价格低廉和易于集成等优点而广受欢迎。本研究旨在为 MEMS 声发射传感器的发展提供方向，并预测其未来在微精密仪器结构健康检测方面的潜力。本文总结了三种 MEMS 声发射传感器的最新研究进展，比较了它们各自的优缺点，分析了它们的研究重点，并预测了它们未来的发展趋势。研究结果压阻式、压电式和电容式 MEMS 声发射传感器是 MEMS 声发射传感器的三大主流，它们各有优缺点。现有研究尚未应用于实践，MEMS 声发射传感器在宽频/高灵敏度、良好的鲁棒性以及与互补金属氧化物半导体的集成等方面仍需进一步研究。本文系统阐述了 MEMS 声发射传感器的现有研究成果，并指出了 MEMS 声发射传感器在未来研究领域的进一步发展方向。为实际检测狭窄结构中的微弱声发射信号提供了重要的参考价值。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Progress of MEMS acoustic emission sensor: a review

Purpose

Based on the micro-electro-mechanical system (MEMS) technology, acoustic emission sensors have gained popularity owing to their small size, consistency, affordability and easy integration. This study aims to provide direction for the advancement of MEMS acoustic emission sensors and predict their future potential for structural health detection of microprecision instruments.

Design/methodology/approach

This paper summarizes the recent research progress of three MEMS acoustic emission sensors, compares their individual strengths and weaknesses, analyzes their research focus and predicts their development trend in the future.

Findings

Piezoresistive, piezoelectric and capacitive MEMS acoustic emission sensors are the three main streams of MEMS acoustic emission sensors, which have their own advantages and disadvantages. The existing research has not been applied in practice, and MEMS acoustic emission sensor still needs further research in the aspects of wide frequency/high sensitivity, good robustness and integration with complementary metal oxide semiconductor. MEMS acoustic emission sensor has great development potential.

Originality/value

In this paper, the existing research achievements of MEMS acoustic emission sensors are described systematically, and the further development direction of MEMS acoustic emission sensors in the future research field is pointed out. It provides an important reference value for the actual weak acoustic emission signal detection in narrow structures.

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来源期刊

Sensor Review 工程技术-仪器仪表

CiteScore

3.40

自引率

6.20%

发文量

审稿时长

3.7 months

期刊介绍： Sensor Review publishes peer reviewed state-of-the-art articles and specially commissioned technology reviews. Each issue of this multidisciplinary journal includes high quality original content covering all aspects of sensors and their applications, and reflecting the most interesting and strategically important research and development activities from around the world. Because of this, readers can stay at the very forefront of high technology sensor developments. Emphasis is placed on detailed independent regular and review articles identifying the full range of sensors currently available for specific applications, as well as highlighting those areas of technology showing great potential for the future. The journal encourages authors to consider the practical and social implications of their articles. All articles undergo a rigorous double-blind peer review process which involves an initial assessment of suitability of an article for the journal followed by sending it to, at least two reviewers in the field if deemed suitable. Sensor Review’s coverage includes, but is not restricted to: Mechanical sensors – position, displacement, proximity, velocity, acceleration, vibration, force, torque, pressure, and flow sensors Electric and magnetic sensors – resistance, inductive, capacitive, piezoelectric, eddy-current, electromagnetic, photoelectric, and thermoelectric sensors Temperature sensors, infrared sensors, humidity sensors Optical, electro-optical and fibre-optic sensors and systems, photonic sensors Biosensors, wearable and implantable sensors and systems, immunosensors Gas and chemical sensors and systems, polymer sensors Acoustic and ultrasonic sensors Haptic sensors and devices Smart and intelligent sensors and systems Nanosensors, NEMS, MEMS, and BioMEMS Quantum sensors Sensor systems: sensor data fusion, signals, processing and interfacing, signal conditioning.