Ming Guo, Yong-xiang Zhang, Nan Li, Hong Li, Si-qi Zhang, Ji-xing Cai
{"title":"真空条件下纳秒激光在硅上的辐照特性","authors":"Ming Guo, Yong-xiang Zhang, Nan Li, Hong Li, Si-qi Zhang, Ji-xing Cai","doi":"10.1007/s12648-024-03266-5","DOIUrl":null,"url":null,"abstract":"<p>To investigate the influence of the vacuum environment on the near-infrared nanosecond pulse laser irradiation of silicon materials, irradiation effects such as the distribution and evolution of the microstructure, as well as the erosion morphology of silicon under various vacuum levels, are investigated. The experimental results show that when the laser energy density is low, silicon’s temperature rises and volume expands due to the laser energy absorption, resulting in thermal stress within the irradiation area and the appearance of cracks on the surface. As the laser energy density increases, a molten pit appears at the ablation center, and the size of the molten pit increases with the energy density, resulting in a significant increase in the damaged area. The damage diameter decreases with the vacuum level. However, the effect of vacuum level on the damage diameter is not significant when the excitation energy density is low. The damage area of monocrystalline silicon increases approximately linearly with the laser repetition rate. Laser absorption is primarily Finier absorption in high vacuum conditions, whereas reverse toughening absorption is predominant in low vacuum conditions. This study can be used as a reference for surface treatment, drilling, and development of new monocrystalline silicon materials.</p>","PeriodicalId":584,"journal":{"name":"Indian Journal of Physics","volume":null,"pages":null},"PeriodicalIF":1.6000,"publicationDate":"2024-05-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Irradiation characteristics of nanosecond laser on silicon under vacuum conditions\",\"authors\":\"Ming Guo, Yong-xiang Zhang, Nan Li, Hong Li, Si-qi Zhang, Ji-xing Cai\",\"doi\":\"10.1007/s12648-024-03266-5\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>To investigate the influence of the vacuum environment on the near-infrared nanosecond pulse laser irradiation of silicon materials, irradiation effects such as the distribution and evolution of the microstructure, as well as the erosion morphology of silicon under various vacuum levels, are investigated. The experimental results show that when the laser energy density is low, silicon’s temperature rises and volume expands due to the laser energy absorption, resulting in thermal stress within the irradiation area and the appearance of cracks on the surface. As the laser energy density increases, a molten pit appears at the ablation center, and the size of the molten pit increases with the energy density, resulting in a significant increase in the damaged area. The damage diameter decreases with the vacuum level. However, the effect of vacuum level on the damage diameter is not significant when the excitation energy density is low. The damage area of monocrystalline silicon increases approximately linearly with the laser repetition rate. Laser absorption is primarily Finier absorption in high vacuum conditions, whereas reverse toughening absorption is predominant in low vacuum conditions. This study can be used as a reference for surface treatment, drilling, and development of new monocrystalline silicon materials.</p>\",\"PeriodicalId\":584,\"journal\":{\"name\":\"Indian Journal of Physics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2024-05-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Indian Journal of Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1007/s12648-024-03266-5\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Indian Journal of Physics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1007/s12648-024-03266-5","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}
Irradiation characteristics of nanosecond laser on silicon under vacuum conditions
To investigate the influence of the vacuum environment on the near-infrared nanosecond pulse laser irradiation of silicon materials, irradiation effects such as the distribution and evolution of the microstructure, as well as the erosion morphology of silicon under various vacuum levels, are investigated. The experimental results show that when the laser energy density is low, silicon’s temperature rises and volume expands due to the laser energy absorption, resulting in thermal stress within the irradiation area and the appearance of cracks on the surface. As the laser energy density increases, a molten pit appears at the ablation center, and the size of the molten pit increases with the energy density, resulting in a significant increase in the damaged area. The damage diameter decreases with the vacuum level. However, the effect of vacuum level on the damage diameter is not significant when the excitation energy density is low. The damage area of monocrystalline silicon increases approximately linearly with the laser repetition rate. Laser absorption is primarily Finier absorption in high vacuum conditions, whereas reverse toughening absorption is predominant in low vacuum conditions. This study can be used as a reference for surface treatment, drilling, and development of new monocrystalline silicon materials.
期刊介绍:
Indian Journal of Physics is a monthly research journal in English published by the Indian Association for the Cultivation of Sciences in collaboration with the Indian Physical Society. The journal publishes refereed papers covering current research in Physics in the following category: Astrophysics, Atmospheric and Space physics; Atomic & Molecular Physics; Biophysics; Condensed Matter & Materials Physics; General & Interdisciplinary Physics; Nonlinear dynamics & Complex Systems; Nuclear Physics; Optics and Spectroscopy; Particle Physics; Plasma Physics; Relativity & Cosmology; Statistical Physics.