{"title":"通过后退火制造的高精度双轴 GMR 角度传感器","authors":"Zitong Zhou, Zhiqiang Cao, Shaohua Yan, Xiaolong Wang, Libo Xie, Shiyang Lu, Dapeng Zhu, Qunwen Leng, Weisheng Zhao","doi":"10.1007/s11432-024-4020-y","DOIUrl":null,"url":null,"abstract":"<p>This work demonstrates a high-precision in-plane two-axis GMR angle sensor is prepared by post-annealing. The pinning direction of the GMR strips is modulated by annealing two times to achieve orthogonal sensitive directions of the two sensors. The sensitivity of a full-bridge sensor is 6.59 mV/V/mT, with the sensing direction along the <i>Y</i>-axis and the sensitivity of a half-bridge GMR sensor is 1.68 mV/V/mT with the sensing direction along the <i>X</i>-axis. A simulation of the two-axis sensor output with the field has been performed, which proves the correctness of the P2 direction measured by the angle test. The detectivity of the full-bridge sensor is 22 nT/(Hz)<sup>0.5</sup> at 10 Hz and it is 88 nT/(Hz)<sup>0.5</sup> at 10 Hz for half-bridge sensor. The orthogonality error of the two-axis sensor for the geomagnetic angle detection is lower than 0.04. The sensor in this study demonstrates higher detectivity than some commercial GMR sensors, such as YAS532 produced by Yamaha and HSCDTD008A produced by ALPS. This work proposes an efficient and simple method for producing two-axis GMR angle sensors, which can be a promising solution for mass production.</p>","PeriodicalId":21618,"journal":{"name":"Science China Information Sciences","volume":"32 1","pages":""},"PeriodicalIF":7.3000,"publicationDate":"2024-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A high precision two-axis GMR angular sensor manufactured by post-annealing\",\"authors\":\"Zitong Zhou, Zhiqiang Cao, Shaohua Yan, Xiaolong Wang, Libo Xie, Shiyang Lu, Dapeng Zhu, Qunwen Leng, Weisheng Zhao\",\"doi\":\"10.1007/s11432-024-4020-y\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>This work demonstrates a high-precision in-plane two-axis GMR angle sensor is prepared by post-annealing. The pinning direction of the GMR strips is modulated by annealing two times to achieve orthogonal sensitive directions of the two sensors. The sensitivity of a full-bridge sensor is 6.59 mV/V/mT, with the sensing direction along the <i>Y</i>-axis and the sensitivity of a half-bridge GMR sensor is 1.68 mV/V/mT with the sensing direction along the <i>X</i>-axis. A simulation of the two-axis sensor output with the field has been performed, which proves the correctness of the P2 direction measured by the angle test. The detectivity of the full-bridge sensor is 22 nT/(Hz)<sup>0.5</sup> at 10 Hz and it is 88 nT/(Hz)<sup>0.5</sup> at 10 Hz for half-bridge sensor. The orthogonality error of the two-axis sensor for the geomagnetic angle detection is lower than 0.04. The sensor in this study demonstrates higher detectivity than some commercial GMR sensors, such as YAS532 produced by Yamaha and HSCDTD008A produced by ALPS. This work proposes an efficient and simple method for producing two-axis GMR angle sensors, which can be a promising solution for mass production.</p>\",\"PeriodicalId\":21618,\"journal\":{\"name\":\"Science China Information Sciences\",\"volume\":\"32 1\",\"pages\":\"\"},\"PeriodicalIF\":7.3000,\"publicationDate\":\"2024-05-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Science China Information Sciences\",\"FirstCategoryId\":\"94\",\"ListUrlMain\":\"https://doi.org/10.1007/s11432-024-4020-y\",\"RegionNum\":2,\"RegionCategory\":\"计算机科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"COMPUTER SCIENCE, INFORMATION SYSTEMS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Science China Information Sciences","FirstCategoryId":"94","ListUrlMain":"https://doi.org/10.1007/s11432-024-4020-y","RegionNum":2,"RegionCategory":"计算机科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"COMPUTER SCIENCE, INFORMATION SYSTEMS","Score":null,"Total":0}
A high precision two-axis GMR angular sensor manufactured by post-annealing
This work demonstrates a high-precision in-plane two-axis GMR angle sensor is prepared by post-annealing. The pinning direction of the GMR strips is modulated by annealing two times to achieve orthogonal sensitive directions of the two sensors. The sensitivity of a full-bridge sensor is 6.59 mV/V/mT, with the sensing direction along the Y-axis and the sensitivity of a half-bridge GMR sensor is 1.68 mV/V/mT with the sensing direction along the X-axis. A simulation of the two-axis sensor output with the field has been performed, which proves the correctness of the P2 direction measured by the angle test. The detectivity of the full-bridge sensor is 22 nT/(Hz)0.5 at 10 Hz and it is 88 nT/(Hz)0.5 at 10 Hz for half-bridge sensor. The orthogonality error of the two-axis sensor for the geomagnetic angle detection is lower than 0.04. The sensor in this study demonstrates higher detectivity than some commercial GMR sensors, such as YAS532 produced by Yamaha and HSCDTD008A produced by ALPS. This work proposes an efficient and simple method for producing two-axis GMR angle sensors, which can be a promising solution for mass production.
期刊介绍:
Science China Information Sciences is a dedicated journal that showcases high-quality, original research across various domains of information sciences. It encompasses Computer Science & Technologies, Control Science & Engineering, Information & Communication Engineering, Microelectronics & Solid-State Electronics, and Quantum Information, providing a platform for the dissemination of significant contributions in these fields.