Feedforward compensation of the pose-dependent vibration of a silicon wafer handling robot

Frog-legged robots are commonly used for silicon wafer handling in semiconductor manufacturing. However, their precision, speed and versatility are limited by vibration which varies with their position in the workspace. This paper proposes a methodology for modelling the pose-dependent vibration of a frog-legged robot as a function of its changing inertia, and its experimentally-identified joint stiffness and damping. The model is used to design a feedforward tracking controller for compensating the pose-dependent vibration of the robot. In experiments, the proposed method yields 65–73% reduction in RMS tracking error compared to a baseline controller designed for specific poses of the robot.