N. Giagkas, J. Nasr, D. Matei, S. Vizireanu, D. Cursaru, S. Mihai
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引用次数: 0
摘要
本文的重点是通过磁控等离子体溅射合成和表征 Zr/Ti 和 Ti/Zr 氮化物多层涂层,以提高其摩擦学性能。氮化物的合成是通过使用 Ti 或 Zr 氮化物靶材进行非反应沉积或在氮气存在下使用 Ti 或 Zr 靶材进行反应沉积实现的。通过 XRD、EDX 和 XPS 研究了氮化物层的形成,并使用 HFRR 设备进行了摩擦学特性研究。摩擦学研究表明,以氮化锆为上层的多层薄膜的摩擦系数和磨损痕直径都有所下降。
Preparation and tribologic properties of Ti and Zr nitride multilayer coatings
This paper focuses on synthesis and characterization of Zr/Ti and Ti/Zr nitride multilayer coatings by magnetron plasma sputtering to enhance the tribologic properties. The synthesis of nitrides was achieved by non-reactive deposition using Ti or Zr nitride targets or by reactive deposition using Ti or Zr targets in the presence of nitrogen. The formation of nitride layers was highlighted by XRD, EDX and XPS investigations, while the tribologic properties were made with HFRR equipment. The tribological study showed that the coefficient of friction and wear scar diameter decrease in multilayer films with zirconium nitride as the upper layer.