Junzhi Zhu, Song Wu, Luming Wang, Jiaqi Wu, Jiankai Zhu, Luwei Zou, Fei Xiao, Ziluo Su, Chenyin Jiao, Shenghai Pei, Zejuan Zhang, Jiaze Qin, Bo Xu, Yu Zhou, Juan Xia, Zenghui Wang
{"title":"基于二维非层状材料:β-In2S3 的纳米机械谐振器实现宽范围、高线性度和快速响应压力传感","authors":"Junzhi Zhu, Song Wu, Luming Wang, Jiaqi Wu, Jiankai Zhu, Luwei Zou, Fei Xiao, Ziluo Su, Chenyin Jiao, Shenghai Pei, Zejuan Zhang, Jiaze Qin, Bo Xu, Yu Zhou, Juan Xia, Zenghui Wang","doi":"10.1002/inf2.12553","DOIUrl":null,"url":null,"abstract":"<p>Two-dimensional (2D) non-layered materials, along with their unique surface properties, offer intriguing prospects for sensing applications. Introducing mechanical degrees of freedom is expected to enrich the sensing performances of 2D non-layered devices, such as high frequency, high tunability, and large dynamic range, which could lead to new types of high performance nanosensors. Here, we demonstrate 2D non-layered nanomechanical resonant sensors based on <i>β</i>-In<sub>2</sub>S<sub>3</sub>, where the devices exhibit robust nanomechanical vibrations up to the very high frequency (VHF) band. We show that such device can operate as pressure sensor with broad range (from 10<sup>−3</sup> Torr to atmospheric pressure), high linearity (with a nonlinearity factor as low as 0.0071), and fast response (with an intrinsic response time less than 1 μs). We further unveil the frequency scaling law in these <i>β</i>-In<sub>2</sub>S<sub>3</sub> nanomechanical sensors and successfully extract both the Young's modulus and pretension for the crystal. Our work paves the way towards future wafer-scale design and integrated sensors based on 2D non-layered materials.</p><p>\n <figure>\n <div><picture>\n <source></source></picture><p></p>\n </div>\n </figure></p>","PeriodicalId":48538,"journal":{"name":"Infomat","volume":null,"pages":null},"PeriodicalIF":22.7000,"publicationDate":"2024-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/inf2.12553","citationCount":"0","resultStr":"{\"title\":\"Broad-range, high-linearity, and fast-response pressure sensing enabled by nanomechanical resonators based on 2D non-layered material: β-In2S3\",\"authors\":\"Junzhi Zhu, Song Wu, Luming Wang, Jiaqi Wu, Jiankai Zhu, Luwei Zou, Fei Xiao, Ziluo Su, Chenyin Jiao, Shenghai Pei, Zejuan Zhang, Jiaze Qin, Bo Xu, Yu Zhou, Juan Xia, Zenghui Wang\",\"doi\":\"10.1002/inf2.12553\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>Two-dimensional (2D) non-layered materials, along with their unique surface properties, offer intriguing prospects for sensing applications. Introducing mechanical degrees of freedom is expected to enrich the sensing performances of 2D non-layered devices, such as high frequency, high tunability, and large dynamic range, which could lead to new types of high performance nanosensors. Here, we demonstrate 2D non-layered nanomechanical resonant sensors based on <i>β</i>-In<sub>2</sub>S<sub>3</sub>, where the devices exhibit robust nanomechanical vibrations up to the very high frequency (VHF) band. We show that such device can operate as pressure sensor with broad range (from 10<sup>−3</sup> Torr to atmospheric pressure), high linearity (with a nonlinearity factor as low as 0.0071), and fast response (with an intrinsic response time less than 1 μs). We further unveil the frequency scaling law in these <i>β</i>-In<sub>2</sub>S<sub>3</sub> nanomechanical sensors and successfully extract both the Young's modulus and pretension for the crystal. Our work paves the way towards future wafer-scale design and integrated sensors based on 2D non-layered materials.</p><p>\\n <figure>\\n <div><picture>\\n <source></source></picture><p></p>\\n </div>\\n </figure></p>\",\"PeriodicalId\":48538,\"journal\":{\"name\":\"Infomat\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":22.7000,\"publicationDate\":\"2024-05-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://onlinelibrary.wiley.com/doi/epdf/10.1002/inf2.12553\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Infomat\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://onlinelibrary.wiley.com/doi/10.1002/inf2.12553\",\"RegionNum\":1,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Infomat","FirstCategoryId":"88","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/inf2.12553","RegionNum":1,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Broad-range, high-linearity, and fast-response pressure sensing enabled by nanomechanical resonators based on 2D non-layered material: β-In2S3
Two-dimensional (2D) non-layered materials, along with their unique surface properties, offer intriguing prospects for sensing applications. Introducing mechanical degrees of freedom is expected to enrich the sensing performances of 2D non-layered devices, such as high frequency, high tunability, and large dynamic range, which could lead to new types of high performance nanosensors. Here, we demonstrate 2D non-layered nanomechanical resonant sensors based on β-In2S3, where the devices exhibit robust nanomechanical vibrations up to the very high frequency (VHF) band. We show that such device can operate as pressure sensor with broad range (from 10−3 Torr to atmospheric pressure), high linearity (with a nonlinearity factor as low as 0.0071), and fast response (with an intrinsic response time less than 1 μs). We further unveil the frequency scaling law in these β-In2S3 nanomechanical sensors and successfully extract both the Young's modulus and pretension for the crystal. Our work paves the way towards future wafer-scale design and integrated sensors based on 2D non-layered materials.
期刊介绍:
InfoMat, an interdisciplinary and open-access journal, caters to the growing scientific interest in novel materials with unique electrical, optical, and magnetic properties, focusing on their applications in the rapid advancement of information technology. The journal serves as a high-quality platform for researchers across diverse scientific areas to share their findings, critical opinions, and foster collaboration between the materials science and information technology communities.