Margono Margono, D. Darmadi, T. D. Widodo, Suprapto Suprapto, T. Sujitno, Muhammad Kozin
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引用次数: 0
摘要
氮化钛涂层在提高铝合金硬度方面备受关注。本研究旨在探讨 Ar：N 混合气体和时间对使用直流溅射提高铝合金硬度的影响。利用流动混合气体参数和时间在铝合金基底上制备 TiN 薄膜。首先，在 90Ar:10N、80Ar:20N、70Ar:30N 和 60Ar:40N（%）的混合气体中将 TiN 层沉积在样品上 60 分钟。然后在第二道工序中使用产生最高表面硬度的最佳混合气体，时间分别为 30、60、90 和 120 分钟。结果表明，70Ar:30N 的混合气体和 60 分钟的时间可产生最高的硬度。铝表面形成的 TiN 相是通过 XRD 确定的，而表面形貌则是通过 SEM 观察的。与未处理的样品相比，处理后样品的硬度明显提高。
Hardness and Microstructure of TiN Coating on Aluminum Alloy with DC Sputtering
Titanium Nitride coating has attracted much interest in increasing the hardness of aluminum alloys. This study aims to investigate the effect of Ar: N gas mixture and time on increasing the hardness of aluminum alloys using DC sputtering. Preparation of TiN thin films on aluminum alloy substrates using flowing gas mixture parameters and time. First, the layer of TiN was deposited on the sample with a gas mixture of 90Ar:10N; 80Ar:20N; 70Ar:30N; and 60Ar:40N (%) for 60 minutes. Then the optimum gas mixture that produces the highest surface hardness is used in the second process with time variations of 30, 60, 90, and 120 minutes. The results showed that the highest hardness was achieved in a gas mixture of 70Ar:30N and 60 minutes. The TiN phase formed on the aluminum surface was identified by XRD, while the surface morphology was observed by SEM. Compared with untreated samples, the hardness of treated samples increased significantly.
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