利用 MEMS 平面内重构技术实现高性能、可传输波长的片上傅立叶变换光谱仪

Heng Chen, Hui Zhang, Jing Zhou, Chen Ma, Qian Huang, Hanxing Wang, Qinghua Ren, Nan Wang, Chengkuo Lee, Yiming Ma
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High-Performance and Wavelength-Transplantable On-Chip Fourier Transform Spectrometer Using MEMS In-Plane Reconfiguration
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