预应变柔性氧化锌薄膜的不对称光学特性和带隙偏移

APL Materials Pub Date : 2024-04-01 DOI:10.1063/5.0202381
Jiamin Liu, Zhikang Zhou, Honggang Gu, Jinlong Zhu, Hao Jiang, Shiyuan Liu
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引用次数: 0

摘要

应变工程已被广泛用于调节柔性无机半导体薄膜的各种固有特性。然而,在柔性无机半导体薄膜中,拉伸和压缩应变引起的光电特性调制及其差异的实验表征还不容易实现。本文采用基于穆勒矩阵椭偏仪的定量表征方法,结合 X 射线衍射和第一原理计算,系统研究了柔性氧化锌薄膜在预拉伸和预压缩应变下的应变相关结构、光学和光电特性。通过在双向弯曲模式下进行扩展预应力驱动沉积处理,可在柔性氧化锌薄膜中实现具有对称大小的预拉伸和预压缩应变,从而可以精确观测应变驱动的光电特性非对称调制。当施加的预应变从 0%(基线)到-0.99%(压缩)和 1.07%(拉伸)变化大致相同时,c 轴晶格常数的相对变化分别为 0.0133 和 0.0104 Å。同时,带隙能与预压缩应变和预拉伸应变的相关系数分别为-0.0099和-0.0156 eV/%,复折射率也呈现出不对称的变化趋势。在应变应力分析和第一原理计算的帮助下,引人入胜的非对称应变-光学调制效应可归因于双轴应变机制和两种预应变模式之间变形势的差异。因此,这些系统研究结果有望为柔性无机半导体组合的蓬勃应用奠定基础。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Asymmetric optical properties and bandgap shift of pre-strained flexible ZnO films
Strain engineering has been extensively explored to modulate the various intrinsic properties of flexible inorganic semiconductor films. However, experimental characterization of tensile and compressive strain-induced modulation of optoelectronic properties and their differences has not been easily implemented in flexible inorganic semiconductor films. Herein, the strain-dependent structural, optical, and optoelectronic properties of flexible ZnO films under pre-tensile and pre-compressive strains are systemically investigated by a Mueller matrix ellipsometry-based quantitative characterization method combined with x-ray diffraction and first-principle calculation. With extended prestress-driven deposition processing under bi-direction bending modes, pre-tensile and pre-compressive strains with symmetric magnitudes can be achieved in flexible ZnO films, which allows precise observation of the strain-driven asymmetric modulation of optoelectronic properties. When the applied prestrain varies approximately equally from 0% (baseline) to −0.99% (compression) and 1.07% (tensility), respectively, the relative changes for the c-axis lattice constant are 0.0133 and 0.0104 Å, respectively. Meanwhile, the dependence factors of the bandgap energy on the pre-compression and pre-tensile strains were determined as −0.0099 and −0.0156 eV/%, respectively, and the complex refractive index also presents an asymmetric varying trend. With the help of the strain–stress analysis and the first-principle calculation, the intriguing asymmetric strain-optical modulation effect could be attributed to the biaxial strain mechanism and the difference in the deformation potential between the two prestrain modes. These systematic investigation consequences are thus promising as a basis for the booming applications of the flexible inorganic semiconductor ensemble.
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