研究 Si(111) 上 Mg2Si 薄膜的表面形貌、光学和电子特性

D. V. Fomin, A. V. Polyakov, K. Galkin, N. G. Galkin
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摘要

文章介绍了在 Si (111) 上形成的 Mg2Si 薄膜的元素组成、表面形貌、光学和电子特性的研究结果。这两种含有薄膜的样品都是通过反应外延方法分层形成的,但基底的加热温度不同。根据电子欧杰光谱法,所形成的薄膜由镁和硅以 3:1 的比例交替层叠而成,在相关层中含有镁原子和硅原子。拉曼光散射法确定了样品图上在 258 和 348cm-1 处存在属于 Mg2Si 的峰值。红外光谱数据也表明薄膜中存在硅化镁。根据已知的 272 cm-1 处吸收峰的振幅与吸收系数的关系数据,估算出了 Mg2Si 薄膜的厚度,从而得出了生长薄膜的厚度值。根据样品在红外-紫外范围内的研究结果和几何计算,确定了 Mg2Si 带隙的宽度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation of surface morphology, optical and electronic properties of Mg2Si thin films on Si(111)
The article presents the results of a study of the elemental composition, surface morphology, optical and electronic properties of Mg2Si thin films formed on Si (111). Both samples containing films were formed in layers by the method of reactive epitaxy, but at different heating temperatures of the substrates. The formed films consisting of alternating layers of Mg and Si at a ratio of 3:1, according to electron Auger spectroscopy, contain Mg and Si atoms in the associated layers. The Raman light scattering method established the presence of peaks on the graphs of samples at a shift of 258 and 348cm-1 belonging to Mg2Si. Infrared spectroscopy data also indicate the presence of magnesium silicide in the films. The thickness of Mg2Si films was estimated from the data of the known dependence of the amplitude of absorption peaks at 272 cm-1 on the absorption coefficient, which gave the values of the thicknesses of the grown films. Based on the results of the study of samples in the infrared-ultraviolet range and on the basis of geometric calculations, the width of the Mg2Si band gap was determined.
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