含电荷空位的氮化铝的弹性和压电性

IF 6.7 3区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
Qiaoya Lv, Jian Qiu, Quan Wen
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引用次数: 0

摘要

伍兹氮化铝(w-AlN)压电薄膜在现代微机电系统致动器和传感器中发挥着关键作用。密度泛函理论可用于预测压电薄膜的弹性和压电特性...
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The elasticity and piezoelectricity of AlN containing charged vacancies
Wurtzite aluminum nitride (w-AlN) piezoelectric film plays a key role in modern MEMS actuators and sensors. Density functional theory can be used to predict the elastic and piezoelectric properties...
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来源期刊
International Journal of Optomechatronics
International Journal of Optomechatronics 工程技术-工程:电子与电气
CiteScore
9.30
自引率
0.00%
发文量
3
审稿时长
3 months
期刊介绍: International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics. Topics you can submit include, but are not limited to: -Adaptive optics- Optomechanics- Machine vision, tracking and control- Image-based micro-/nano- manipulation- Control engineering for optomechatronics- Optical metrology- Optical sensors and light-based actuators- Optomechatronics for astronomy and space applications- Optical-based inspection and fault diagnosis- Micro-/nano- optomechanical systems (MOEMS)- Optofluidics- Optical assembly and packaging- Optical and vision-based manufacturing, processes, monitoring, and control- Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)
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