气簇离子辐照下的表面纳米氧化物形成模型

IF 0.4 4区物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY

Moscow University Physics Bulletin Pub Date : 2024-04-01 DOI:10.3103/S0027134924700115

D. R. Bessmertniy, A. E. Ieshkin

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引用次数: 0

摘要

摘要提出了一个在气体团簇离子照射下表面纳米氧化物演变的模型。该模型基于对单个离子群与表面碰撞的考虑。碰撞区域溅射出的物质数量及其在其他表面元素上重新沉积的效率均可确定。该模型的性能通过与实验数据的对比得以证明。研究了平滑模型谐波浮雕的各个阶段。提出了一种新的表面平滑效率测量方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Model of Surface Nanorelief Formation under Irradiation with Gas Cluster Ions

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Model of Surface Nanorelief Formation under Irradiation with Gas Cluster Ions

A model for the evolution of surface nanorelief under irradiation with gas cluster ions is proposed. The model is based on the consideration of individual cluster collisions with a surface. The amount of material sputtered from the collision area and the efficiency of its redeposition on other surface elements are determined. The model’s performance is demonstrated through comparison with experimental data. The stages of smoothing the model harmonic relief are investigated. A new measure of surface smoothing efficiency is proposed.

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来源期刊

Moscow University Physics Bulletin PHYSICS, MULTIDISCIPLINARY-

CiteScore

0.70

自引率

0.00%

发文量

129

审稿时长

6-12 weeks

期刊介绍： Moscow University Physics Bulletin publishes original papers (reviews, articles, and brief communications) in the following fields of experimental and theoretical physics: theoretical and mathematical physics; physics of nuclei and elementary particles; radiophysics, electronics, acoustics; optics and spectroscopy; laser physics; condensed matter physics; chemical physics, physical kinetics, and plasma physics; biophysics and medical physics; astronomy, astrophysics, and cosmology; physics of the Earth’s, atmosphere, and hydrosphere.