论提高双升压 DC-DC 转换器的元件密度.材料的错配应力和多孔性对工艺流程的影响

E. L. Pankratov
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引用次数: 0

摘要

本文介绍了一种在双升压直流-直流转换器框架内提高场效应异质晶体管和异质二极管密度的方法。在该方法的框架内,我们考虑在具有特定配置的异质结构中制造逆变器。异质结构所需的几个区域应通过扩散或离子注入进行掺杂。然后在优化方案的框架内对掺杂和辐射缺陷进行退火处理。我们还考虑了降低所考虑的异质结构中失配诱导应力值的方法。我们引入了一种分析方法,用于分析集成电路制造过程中异质结构中的质量和热量传输,并将错配诱导应力考虑在内。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
On Increasing of Density of Elements of Double Boost DC-DC Converter. Influence of Mismatch-Induced Stress and Porosity of Materials on the Technological Process
In this paper we introduce an approach to increase density of field-effect heterotransistors and heterodiodes in the framework of double boost DC-DC converter. In the framework of the approach we consider manufacturing the inverter in hetero structure with specific configuration. Several required areas of the heterostructure should be doped by diffusion or ion implantation. After that dopant and radiation defects should by annealed in the framework of the optimized scheme. We also consider an approach to decrease value of mismatch-induced stress in the considered heterostructure. We introduce an analytical approach to analyze mass and heat transport in heterostructures during manufacturing of integrated circuits with account mismatch-induced stress.
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