在水蒸气存在下通过等离子体增强乙炔化学气相沉积法生长碳纳米管

Revista UIS Ingenierías Pub Date : 2024-02-11 DOI:10.18273/revuin.v23n1-2024004

Júlia Sancho-Tapia, Enric Bertran-Sierra, R. Ospina

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引用次数: 0

摘要

碳纳米管可以通过多种技术合成。这项工作旨在研究通过等离子体增强化学气相沉积（PECVD）生长碳纳米管的实验过程。此外，该研究还旨在校准反应器，并开发 LabVIEW 代码，以便将水引入该过程，从而实现水辅助 PECVD 程序。获得的样品将通过扫描电镜图像和拉曼光谱分析进行评估。

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Carbon nanotubes grown by plasma enhanced chemical vapor deposition of acetylene in the presence of water vapor

Carbon nanotubes can be synthesized using various techniques. This work aims to study the experimental process of growing carbon nanotubes via plasma-enhanced chemical vapor deposition (PECVD). Additionally, the study aims to calibrate the reactor and develop a LabVIEW code to introduce water into the process, enabling a water-assisted PECVD procedure. The obtained samples are evaluated through the analysis of SEM images and Raman spectra.

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Revista UIS Ingenierías

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