{"title":"通过几何和工艺变化设计和分析用于高频应用的反相 T 型无结 (JL) FET 的电气特性","authors":"Sameeksha Munjal, Neelam Rup Prakash, Jasbir Kaur, Komal","doi":"10.55766/sujst-2023-06-e01131","DOIUrl":null,"url":null,"abstract":"An inverted-T structure is implemented with the Junctionless (JL) topology at nanoscale dimensions. The Inverted-T Junctionless (ITJL) FET features a multi-fin architecture that utilizes the unused space within the fins and combines it with the junctionless topology, maintaining the same doping concentration from source to drain. In order to mitigate the short channel effects and overcome the fabrication challenges, an inverted-T FET has been designed. The crucial performance parameters of device are explored by varying the geometric dimensions and process parameters. The performance of ITJLFET is measured by varying different parameters namely temperature (T), doping concentration (Nd), work function 𝒎 ), and dielectric constant (K) at 30-nm technology node and effect of geometric variations are measured by altering the gate length (Lg) and oxide thickness (Tox). Inverted-T junctionless field effect transistor (ITJLFET) is designed with different gate lengths in the range of 14 nm to 30 nm and shows the improvement in ION by 64% as compared to the conventional JLFET. The parametric analysis like transfer characteristics (Id-Vgs), Ion/IOFF ratio, subthreshold swing (SS), drain induced barrier lowering (DIBL) and gate capacitance (Cgg) are investigated for 250 K to 350 K. From the results, it is perceived that temperature has less effect on the Inverted-T junctionless transistor performance. The cut-off frequency for the designed device is calculated and observed to be in the range of 0.3 to 1.5 THz. Hence, device can be used for high-frequency applications at the submicron regime.","PeriodicalId":509211,"journal":{"name":"Suranaree Journal of Science and Technology","volume":"15 32","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-02-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"DESIGN AND ANALYSIS OF ELECTRICAL CHARACTERISTICS OF INVERTED-T JUNCTIONLESS (JL) FET THROUGH GEOMETRIC AND PROCESS VARIATIONS FOR HIGH FREQUENCY APPLICATIONS\",\"authors\":\"Sameeksha Munjal, Neelam Rup Prakash, Jasbir Kaur, Komal\",\"doi\":\"10.55766/sujst-2023-06-e01131\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An inverted-T structure is implemented with the Junctionless (JL) topology at nanoscale dimensions. The Inverted-T Junctionless (ITJL) FET features a multi-fin architecture that utilizes the unused space within the fins and combines it with the junctionless topology, maintaining the same doping concentration from source to drain. In order to mitigate the short channel effects and overcome the fabrication challenges, an inverted-T FET has been designed. The crucial performance parameters of device are explored by varying the geometric dimensions and process parameters. The performance of ITJLFET is measured by varying different parameters namely temperature (T), doping concentration (Nd), work function 𝒎 ), and dielectric constant (K) at 30-nm technology node and effect of geometric variations are measured by altering the gate length (Lg) and oxide thickness (Tox). Inverted-T junctionless field effect transistor (ITJLFET) is designed with different gate lengths in the range of 14 nm to 30 nm and shows the improvement in ION by 64% as compared to the conventional JLFET. The parametric analysis like transfer characteristics (Id-Vgs), Ion/IOFF ratio, subthreshold swing (SS), drain induced barrier lowering (DIBL) and gate capacitance (Cgg) are investigated for 250 K to 350 K. From the results, it is perceived that temperature has less effect on the Inverted-T junctionless transistor performance. The cut-off frequency for the designed device is calculated and observed to be in the range of 0.3 to 1.5 THz. 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引用次数: 0
摘要
在纳米级尺寸上采用无结 (JL) 拓扑实现了倒 T 结构。倒T型无结(ITJL)场效应晶体管采用多鳍片结构,利用鳍片内的闲置空间,将其与无结拓扑结构相结合,保持源极到漏极相同的掺杂浓度。为了减轻短沟道效应并克服制造难题,我们设计了一种倒 T 型场效应晶体管。通过改变几何尺寸和工艺参数,探索了器件的关键性能参数。在 30 纳米技术节点上,通过改变温度 (T)、掺杂浓度 (Nd)、功函数 𝒎 ) 和介电常数 (K) 等不同参数测量了 ITJLFET 的性能,并通过改变栅极长度 (Lg) 和氧化物厚度 (Tox) 测量了几何变化的影响。在 14 纳米到 30 纳米的范围内,设计了不同栅极长度的反相无结场效应晶体管(ITJLFET),与传统的 JLFET 相比,ION 提高了 64%。在 250 K 至 350 K 的温度范围内,对传输特性(Id-Vgs)、离子/离子交换比(Ion/IOFF)、亚阈值摆幅(SS)、漏极诱导势垒降低(DIBL)和栅极电容(Cgg)等参数进行了分析。经计算和观察,所设计器件的截止频率在 0.3 至 1.5 太赫兹之间。因此,该器件可用于亚微米级的高频应用。
DESIGN AND ANALYSIS OF ELECTRICAL CHARACTERISTICS OF INVERTED-T JUNCTIONLESS (JL) FET THROUGH GEOMETRIC AND PROCESS VARIATIONS FOR HIGH FREQUENCY APPLICATIONS
An inverted-T structure is implemented with the Junctionless (JL) topology at nanoscale dimensions. The Inverted-T Junctionless (ITJL) FET features a multi-fin architecture that utilizes the unused space within the fins and combines it with the junctionless topology, maintaining the same doping concentration from source to drain. In order to mitigate the short channel effects and overcome the fabrication challenges, an inverted-T FET has been designed. The crucial performance parameters of device are explored by varying the geometric dimensions and process parameters. The performance of ITJLFET is measured by varying different parameters namely temperature (T), doping concentration (Nd), work function 𝒎 ), and dielectric constant (K) at 30-nm technology node and effect of geometric variations are measured by altering the gate length (Lg) and oxide thickness (Tox). Inverted-T junctionless field effect transistor (ITJLFET) is designed with different gate lengths in the range of 14 nm to 30 nm and shows the improvement in ION by 64% as compared to the conventional JLFET. The parametric analysis like transfer characteristics (Id-Vgs), Ion/IOFF ratio, subthreshold swing (SS), drain induced barrier lowering (DIBL) and gate capacitance (Cgg) are investigated for 250 K to 350 K. From the results, it is perceived that temperature has less effect on the Inverted-T junctionless transistor performance. The cut-off frequency for the designed device is calculated and observed to be in the range of 0.3 to 1.5 THz. Hence, device can be used for high-frequency applications at the submicron regime.