Numerical simulation of proton backscattering spectra in GEANT4 toolkit

Rutherford backscattering spectroscopy (RBS) is a widely used technique for the atomic-scale analysis of sample composition, lattice displacement and impurity profiling. RBS is based on the elastic scattering of incident charged particles by target nuclei and the subsequent detection of scattered particles. The interpretation of RBS spectra, however, poses challenges due to overlapping peaks, corresponding to scattering from different atomic species, and uncertainties from energy loss, scattering geometry and detector response. To address this, an open source simulation model based on the versatile GEANT4 simulation toolkit has been developed. The flexibility of the open source enables users to tailor the model to its specific requirements, such as the use of specific particle stopping powers, cross-sections, and physics processes. This work presents the results of the comparison between the experimental and simulated backscattering spectra in crystalline silicon, silicon carbide and silicon dioxide samples by 1–2.5 MeV energy protons, obtained in random orientation conditions. The results demonstrate the capability of the model to accurately simulate backscattering spectra in both amorphous materials and single crystals. The overall agreement between the simulated and experimental results is highly promising for future development and use in the interpretation and simulation of RBS spectra.