CMOS 兼容型 AlN 和 ScAlN 热释电探测器的 N2 气体传感响应中的 SF6 混合气体

{"title":"CMOS 兼容型 AlN 和 ScAlN 热释电探测器的 N2 气体传感响应中的 SF6 混合气体","authors":"Doris K. T. Ng, Weiguo Chen, Linfang Xu, Harmony J. E. Lau, Landobasa Y. M. Tobing, Chong Pei Ho, Wing-Wai Chung, N. Jaafar, Hanfeng Fu, Qingxin Zhang","doi":"10.1117/12.3002138","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517784,"journal":{"name":"MOEMS and Miniaturized Systems XXIII","volume":"4 6","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"SF6 mixed in N2 gas sensing responses from CMOS-compatible AlN and ScAlN pyroelectric detectors\",\"authors\":\"Doris K. T. Ng, Weiguo Chen, Linfang Xu, Harmony J. E. Lau, Landobasa Y. M. Tobing, Chong Pei Ho, Wing-Wai Chung, N. Jaafar, Hanfeng Fu, Qingxin Zhang\",\"doi\":\"10.1117/12.3002138\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":517784,\"journal\":{\"name\":\"MOEMS and Miniaturized Systems XXIII\",\"volume\":\"4 6\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-03-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"MOEMS and Miniaturized Systems XXIII\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.3002138\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"MOEMS and Miniaturized Systems XXIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3002138","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}