通过检测多层材料超短脉冲激光烧蚀过程中的声发射实现过程控制

{"title":"通过检测多层材料超短脉冲激光烧蚀过程中的声发射实现过程控制","authors":"Christian Lutz, Ryan Sommerhuber, Matthias Kettner, C. Esen, Ralf Hellmann","doi":"10.1117/12.3000954","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517849,"journal":{"name":"Laser-based Micro- and Nanoprocessing XVIII","volume":"93 5","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Towards process control by detecting acoustic emissions during ultrashort pulsed laser ablation of multilayer materials\",\"authors\":\"Christian Lutz, Ryan Sommerhuber, Matthias Kettner, C. Esen, Ralf Hellmann\",\"doi\":\"10.1117/12.3000954\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":517849,\"journal\":{\"name\":\"Laser-based Micro- and Nanoprocessing XVIII\",\"volume\":\"93 5\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-03-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Laser-based Micro- and Nanoprocessing XVIII\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.3000954\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser-based Micro- and Nanoprocessing XVIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3000954","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}