Martin Wimmer, M. Kaiser, J. Kleiner, Jannis Wolff, M. Kahmann, Daniel Flamm
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引用次数: 0
摘要
报告介绍了选择性激光蚀刻显示器玻璃的模拟和测量结果。通过全息三维分束器,超短激光脉冲在玻璃样品内部聚焦,沿着特定的轨迹产生 III 型修饰,就像珍珠串一样。通过对玻璃样品的进样,形成一个完整的三维改性区域,为后续蚀刻工艺奠定基础。与未修饰区域相比,基于 KOH 的修饰选择性蚀刻率要高得多,从而使玻璃沿修饰轨迹分离。为了进一步了解蚀刻过程,我们对这种湿化学过程进行了模拟,并将其与实验结果进行了比较。
Selective laser etching of displays: closing the gap between optical simulations and fabrication
Simulations and measurements on selective laser etching of display glasses are reported. By means of a holographic 3D beam splitter, ultrashort laser pulses are focused inside the volume of a glass sample creating type III modifications along a specific trajectory like pearls on a string. Superimposed by a feed of the glass sample a full 3D area of modifications is achieved building the cornerstone for subsequent etch processes. Based on KOH the modifications are selectively etched at a much higher rate compared to unmodified regions resulting in a separation of the glass along the trajectory of modifications. For gaining further insight into the etch process, we perform simulations on this wet chemical process and compare it to our experimental results.