纳秒激光诱导硅内部非晶化的直接观测和量化

IF 1.7 4区工程技术 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY

Journal of Laser Applications Pub Date : 2024-03-27 DOI:10.2351/7.0001305

Xinya Wang, Lanh Trinh, Xiaoming Yu, Matthew J. Berg, Sajed Hosseini-Zavareh, Brice Lacroix, Pingping Chen, Ruqi Chen, Bai Cui, Shuting Lei

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引用次数: 0

摘要

研究了纳秒激光修饰硅内部结构变化的性质。拉曼光谱和透射电子显微镜对改性通道横截面的测量揭示了高度局部化的晶体变形。拉曼光谱测量证明了纳秒激光诱导修饰内部非晶硅的存在，并根据拉曼光谱计算了非晶硅的百分比。高分辨率透射电子显微镜图像首次直接显示了纳秒激光诱导修饰内非晶硅的出现，这与拉曼光谱的间接测量结果相印证。激光修饰的通道由少量非晶硅组成，这些非晶硅嵌入了一个受干扰的晶体结构中，并伴有应变。这一发现可以解释与可用作光波导的书面通道相关的正折射率变化的起源。

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Direct observation and quantification of nanosecond laser induced amorphization inside silicon

The nature of structural changes of nanosecond laser modification inside silicon is investigated. Raman spectroscopy and transmission electron microscopy measurements of cross sections of the modified channels reveal highly localized crystal deformation. Raman spectroscopy measurements prove the existence of amorphous silicon inside nanosecond laser induced modifications, and the percentage of amorphous silicon is calculated based on the Raman spectrum. For the first time, the high-resolution transmission electron microscopy images directly show the appearance of amorphous silicon inside nanosecond laser induced modifications, which corroborates the indirect measurements from Raman spectroscopy. The laser modified channel consists of a small amount of amorphous silicon embedded in a disturbed crystal structure accompanied by strain. This finding may explain the origin of the positive refractive index change associated with the written channels that may serve as optical waveguides.

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来源期刊

Journal of Laser Applications 物理-光学

CiteScore

3.60

自引率

9.50%

发文量

125

审稿时长

>12 weeks

期刊介绍： The Journal of Laser Applications (JLA) is the scientific platform of the Laser Institute of America (LIA) and is published in cooperation with AIP Publishing. The high-quality articles cover a broad range from fundamental and applied research and development to industrial applications. Therefore, JLA is a reflection of the state-of-R&D in photonic production, sensing and measurement as well as Laser safety. The following international and well known first-class scientists serve as allocated Editors in 9 new categories: High Precision Materials Processing with Ultrafast Lasers Laser Additive Manufacturing High Power Materials Processing with High Brightness Lasers Emerging Applications of Laser Technologies in High-performance/Multi-function Materials and Structures Surface Modification Lasers in Nanomanufacturing / Nanophotonics & Thin Film Technology Spectroscopy / Imaging / Diagnostics / Measurements Laser Systems and Markets Medical Applications & Safety Thermal Transportation Nanomaterials and Nanoprocessing Laser applications in Microelectronics.